반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

항온항습 환경에 노출된 Al2O3 ALD 박막의 특성 평가

Characteristics Evaluation of Al2O3 ALD Thin Film Exposed to Constant Temperature and Humidity Environment

  • 김현우 (선문대학교 디스플레이반도체공학과) ;
  • 송태민 (선문대학교 디스플레이반도체공학과) ;
  • 이형준 (선문대학교 디스플레이반도체공학과) ;
  • 전용민 (가천대학교 의공학과) ;
  • 권정현 (선문대학교 디스플레이반도체공학과)
  • Kim, Hyeun Woo (Dept. of Display and Semiconductor Engineering, Sunmoon University) ;
  • Song, Tae Min (Dept. of Display and Semiconductor Engineering, Sunmoon University) ;
  • Lee, Hyeong Jun (Dept. of Display and Semiconductor Engineering, Sunmoon University) ;
  • Jeon, Yongmin (Dept. of Biomedical Engineering, Gachon University) ;
  • Kwon, Jeong Hyun (Dept. of Display and Semiconductor Engineering, Sunmoon University)
  • 투고 : 2022.04.04
  • 심사 : 2022.04.29
  • 발행 : 2022.06.30
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초록

In this work, we evaluated the Al2O3 film, which was deposited by atomic layer deposition, degraded by exposure to harsh environments. The Al2O3 films deposited by atomic layer deposition have long been used as a gas diffusion barrier that satisfies barrier requirements for device reliability. To investigate the barrier and mechanical performance of the Al2O3 film with increasing temperature and relative humidity, the properties of the degraded Al2O3 film exposed to the harsh environment were evaluated using electrical calcium test and tensile test. As a result, the water vapor transmission rate of Al2O3 films stored in harsh environments has fallen to a level that is difficult to utilize as a barrier film. Through water vapor transmission rate measurements, it can be seen that the water vapor transmission rate changes can be significant, and the environment-induced degradation is fatal to the Al2O3 thin films. In addition, the surface roughness and porosity of the degraded Al2O3 are significantly increased as the environment becomes severer. the degradation of elongation is caused by the stress concentration at valleys of rough surface and pores generated by the harsh environment. Becaused the harsh envronment-induced degradation convert amorphous Al2O3 to crystalline structure, these encapsulation properties of the Al2O3 film was easily degraded.

키워드

과제정보

본 논문은 2021년도 교육부의 재원으로 한국연구재단의 지원을 받아 수행된 지자체-대학 협력기반 지역혁신사업 및 2022년도 정부(과학기술정보통신부)의 재원으로 한국연구재단의 지원(NRF-2022R1F1A1075914)으로 수행된 결과입니다(2021RIS-004). 또한, 이 연구는 2022년도 산업통상자원부 및 산업기술평가관리원(KEIT) 연구비 지원에 의한 연구임(’20018379).

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