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대형 평판 디스플레이의 정밀 정렬을 위한 캘리브레이션 기술

Calibration Technology for Precise Alignment of Large Flat Panel Displays

  • 홍준호 (금오공과대학교 기계공학과 대학원) ;
  • 신동원 (금오공과대학교 기계시스템공학과)
  • Hong, Jun-Ho (Department of Mechanical Engineering, Graduate School of Kumoh National Institute of Technology) ;
  • Shin, Dongwon (Department of Mechanical System Engineering, Kumoh National Institute of Technology)
  • 투고 : 2021.10.27
  • 심사 : 2022.01.05
  • 발행 : 2022.03.31

초록

In this study, calibration technology that increases the alignment accuracy in large flexible flat panels was studied. For precise of calibration, a systematization of the calibration algorithm was established, and a calibration correction technique was studied to revise calibration errors. A coordinate systems of camera and UVW stage was established to get the global position of the mark, and equations for translational and rotational calibration were systematically derived based on geometrical analysis. Correction process for the calibration data was carried, and alignment experiments were performed sequentially in cases of the presence or absence of calibration-correction. Alignment results of both calibration correction and non-calibration correction showed accuracy performance less than 1㎛. On the other hand, the standard deviation in calibration-correction is smaller than non-calibration correction. Therefore, calibration correction showed improvement of the alignment repeatability.

키워드

과제정보

이 연구는 2019년 국립대학 육성사업비로 지원되었음

참고문헌

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