Clean Technology (청정기술)

The Korean Society of Clean Technology (한국청정기술학회)
권호 표지
DOI QR코드

DOI QR Code

Water Digital Twin for High-tech Electronics Industrial Wastewater Treatment System (I): e-ASM Development and Digital Simulation Implementation

첨단 전자산업 폐수처리시설의 Water Digital Twin(I): e-ASM 모델 개발과 Digital Simulation 구현

  • Shim, Yerim (Department. of Environmental Science and Engineering College of Engineering, Kyung Hee University) ;
  • Lee, Nahui (Department. of Environmental Science and Engineering College of Engineering, Kyung Hee University) ;
  • Jeong, Chanhyeok (Department. of Environmental Science and Engineering College of Engineering, Kyung Hee University) ;
  • Heo, SungKu (Integrated engineering, Department. of Environmental Science and Engineering College of Engineering, Kyung Hee University) ;
  • Kim, SangYoon (Integrated engineering, Department. of Environmental Science and Engineering College of Engineering, Kyung Hee University) ;
  • Nam, KiJeon (Integrated engineering, Department. of Environmental Science and Engineering College of Engineering, Kyung Hee University) ;
  • Yoo, ChangKyoo (Department. of Environmental Science and Engineering College of Engineering, Kyung Hee University)
  • 심예림 (경희대학교 공과대학 환경학 및 환경공학과) ;
  • 이나희 (경희대학교 공과대학 환경학 및 환경공학과) ;
  • 정찬혁 (경희대학교 공과대학 환경학 및 환경공학과) ;
  • 허성구 (경희대학교 공과대학 환경학 및 환경공학과 융합공학전공) ;
  • 김상윤 (경희대학교 공과대학 환경학 및 환경공학과 융합공학전공) ;
  • 남기전 (경희대학교 공과대학 환경학 및 환경공학과 융합공학전공) ;
  • 유창규 (경희대학교 공과대학 환경학 및 환경공학과)
  • Received : 2021.12.01
  • Accepted : 2022.01.12
  • Published : 2022.03.31
Download PDF
⟨ Previous Next ⟩

Abstract

Electronics industrial wastewater treatment facilities release organic wastewaters containing high concentrations of organic pollutants and more than 20 toxic non-biodegradable pollutants. One of the major challenges of the fourth industrial revolution era for the electronics industry is how to treat electronics industrial wastewater efficiently. Therefore, it is necessary to develop an electronics industrial wastewater modeling technique that can evaluate the removal efficiency of organic pollutants, such as chemical oxygen demand (COD), total nitrogen (TN), total phosphorous (TP), and tetramethylammonium hydroxide (TMAH), by digital twinning an electronics industrial organic wastewater treatment facility in a cyber physical system (CPS). In this study, an electronics industrial wastewater activated sludge model (e-ASM) was developed based on the theoretical reaction rates for the removal mechanisms of electronics industrial wastewater considering the growth and decay of micro-organisms. The developed e-ASM can model complex biological removal mechanisms, such as the inhibition of nitrification micro-organisms by non-biodegradable organic pollutants including TMAH, as well as the oxidation, nitrification, and denitrification processes. The proposed e-ASM can be implemented as a Water Digital Twin for real electronics industrial wastewater treatment systems and be utilized for process modeling, effluent quality prediction, process selection, and design efficiency across varying influent characteristics on a CPS.

첨단 전자산업 폐수 처리시설에서 발생되는 유기 폐수는 고농도의 유기물질 및 20가지 이상의 유독 난분해성 물질을 포함하고 있으며, 이를 효율적으로 처리하는 것은 첨단 전자산업의 당면 과제이다. 따라서, 첨단 전자산업 유기폐수 처리시설을 CPS (Cyber physical system)상 Water digital twin으로 구축하여 COD (Chemical Oxygen Demand), TN (Total Nitrogen), TP (Total Phosphorous) 및 TMAH (Tetramethylammonium hydroxide) 등 유기 오염물질의 제거 효율 평가가 가능한 전자산업 폐수 특화 모델 개발이 필요하다. 본 연구에서는 첨단전자산업 유기폐수 제거 메커니즘에 대한 분해 미생물의 성장과 사멸의 이론적인 반응속도식에 기반한 첨단 전자산업 폐수 특화 활성슬러지 모델(Electronics industrial wastewater activated sludge model, e-ASM)을 개발하였다. 개발한 e-ASM은 전자산업 폐수처리공정에서 발생하는 유기물 산화, 질산화, 및 탈질화 과정뿐만 아니라 TMAH 등 난분해성 유기물질의 분해과정 중 발생하는 질산화미생물의 저해(Inhibition) 작용 등 복잡한 생물학적 분해 메커니즘이 모사 가능하다. 이를 활용하여 실제 전자산업 유기폐수 처리시설을 Water Digital Twin으로 구현하여 CPS (Cyber physical system) 상에서 전자산업 폐수처리장에 폐수 유입 성상에 따라 공정 모델링, 유출수 예측, 공법 선정, 설계 효율 평가 등 다양한 목적으로 활용될 수 있다.

Keywords

Acknowledgement

이 논문은 2021년도 과학기술정보통신부의 재원으로 한국연구재단의 지원을 받아 수행된 연구로 이에 감사를 드립니다 (No. 2021R1A2C2007838).

References

  1. Park, H. W. "Trends in Production and Manufacturing Technologies Related to Smart Factories". Journal of the KSME., 57(8), 24-29. (2015).
  2. Kim, S. J., "The 4th Industrial Revolution and smart manufacturing," Korean J. Constr. Eng. Manag., 18(3), 19-22 (2017).
  3. National Academy of Engineering of Korea, "A study on the Competencies and Education Required for Chemical Engineering Engineers in the Era of the 4th Industrial Revolution," 1-15 (2018).
  4. Kim, M. S., "Trends of information and communications industry," KIDIS, No. 43, 3-13 (2020).
  5. Lee, E. M., "Trends of information and communications industry," KIDIS, No. 20, 52-59 (2012).
  6. Ministry of Trade, Industry and Energy, "Korean-semiconductor strategy to realize a comprehensive semiconductor power nation," 13 (2021).
  7. Ministry of Environment, "2020 Generation and Treatment of industrial wastewater," 1-608 (2020).
  8. Lee, J. S., Kim, S. J. and Gil, D. S., "Treatment system according to wastewater characteristics discharged from each process of semiconductor facilities," K.R. Patent No. 10-2241014 (2020).
  9. Kim, J. H., & Jun, S. J. "Treatment of phosphorous in sewage and wastewater". KIC News, 14(5), 13-21. (2011).
  10. Heo, Y. T., "A Study for optimum treatment of TN wastewater including TMAH in LCD industry," Graduate School of Industry, Kyungbook National University Daegu, 13-24 (2011).
  11. National Institute of Environmental Research, "Guidelines on Best Available Techniques for Environmental Pollution Prevention and Integrated Management in Semiconductor Manufacturing Industry," 1-570 (2020).
  12. Kim, M. K., "Study on Phosphorus Removal and Denitrification of Etchant Wastewater," M.Sc. Dissertation. Myongji University Graduate School: Environmental Energy Engineering, 33-35 (2014).
  13. Kang, C. K., "Technological consideration on the domestic production of high quality recycled semiconductor wastewater for industrial purpose," M.Sc. Dissertation. Major Environ. Eng. Dep. Environ. Eng. Grad. Sch. Environ. Public Heal. Youngnam University, 45-50 (2017).
  14. He, S. Y., Lin, Y. H., Hou, K. Y., & Hwang, S. C. J. "Degradation of dimethyl-sulfoxide-containing wastewater using airlift bioreactor by polyvinyl-alcohol-immobilized cell beads". Bioresour. Technol., 102(10), 5609-5616 (2011). https://doi.org/10.1016/j.biortech.2011.02.030
  15. Eskenazi, B., Gold, E. B., Lasley, B. L., Samuels, S. J., Hammond, S. K., Wight, S., ... & Schenker, M. B. "Prospective monitoring of early fetal loss and clinical spontaneous abortion among female semiconductor workers". Am. J. Ind. Med., 28(6), 833-846 (1995). https://doi.org/10.1002/ajim.4700280615
  16. Henze, M., Gujer, W., Mino, T., & van Loosdrecht, M. C. "Activated sludge models ASM1, ASM2, ASM2d and ASM3". IWA publishing. (2000).
  17. Yoo, C. K., Kim, M. H., "Design and Environmental/Economic Performance Evaluation of Wastewater Treatment Plants Using Modeling Methodology," Korean Chem. Eng. Res., 46(3), 610-618 (2008).
  18. Choi, T. H., "A Study on the Optimization of Sewage Treatment Plant Using ASM No.2d Simulation," Ph.D. Dissertation. Dep. Environ. Eng. Grad. Sch. Suwon Univ., 17-19 (2019).
  19. Lee, H. and Yi, J., "Waste Minimization Technology Trends in Semiconductor Industries," CLEAN TECHNOLOGY 4(1), 6-23 (1998).
  20. Jeon, E. T., "A Study on the Decision of Process for Nitrogen Removal in Semiconductor Rinsing Wastewater," M.Sc. Dissertation, Hanyang University Graduate School: Environmental Energy Engineering, 1-46 (2011).
  21. Park, J. Y., Kim, S. J., Choi, K. K., Lee, Y. W., Lee, J. J., Hwang, K. W. and Lee, W. K., "High-Efficient Fluoride Removal and Minimization of Residual Calcium Using Hydrodynamic Cavitation in Inorganic Electronics Wastewater," Environmental Engineering Resarch., 2-3 (2007).
  22. Lin, S. H. and Kiang, C. D., "Combined physical, chemical and biological treatments of wastewater containing organics from a semiconductor plant," J. Hazard. Mater., 97(1-3), 159-171 (2003). https://doi.org/10.1016/S0304-3894(02)00257-1
  23. Lee, G. C., Park, Y. J., Kang, K. H., Jung, M. O., Ryu, D. H., Jung, S. S., & Lee, W. "Characteristics of organic matters in influents and effluents of sewage treatment plants in Gyeongsanbuk-do". Journal of Korean Society of Environmental Engineers, 43(5), 367-376. (2021). https://doi.org/10.4491/KSEE.2021.43.5.367
  24. Che, T. K., Ni, C. H., Chan, Y. C., and Lu, M. C., "MBR/RO/ozone processes for TFT-LCD industrial wastewater treatment and recycling," Water Sci. Technol., 51(6-7), 411-419 (2005). https://doi.org/10.2166/wst.2005.0663
  25. Chuang, S. H., Chang, W. C., Huang, Y. H., Tseng, C. C., and Tai, C. C., "Effects of different carbon supplements on phosphorus removal in low C/P ratio industrial wastewater," Bioresour. Technol., 102(9), 5461-5465 (2011). https://doi.org/10.1016/j.biortech.2010.11.118
  26. Huang, H., Liu, J., Zhang, P., Zhnag, D., and Gao, F., "Investigation on the simultaneous removal of fluoride, ammonia nitrogen and phosphate from semiconductor wastewater using chemical precipitation," Chem. Eng. J., 307, 696-706 (2017). https://doi.org/10.1016/j.cej.2016.08.134
  27. Chung, S., Chung, J., and Chung, C., "Enhanced electrochemical oxidation process with hydrogen peroxide pretreatment for removal of high strength ammonia from semiconductor wastewater," J. Water Process Eng., 37(4), 101-425 (2020).
  28. T. Fukushima, L. M. Whang, P. C. Chen, D. W. Putri, M. Y. Chang, Y. J. Wu and Y. C. Lee., "Linking TFT-LCD wastewater treatment performance to microbial population abundance of Hyphomicromium and Thiobacilluss.pp.," Bioresour. Technology., 141, 131-137 (2013). https://doi.org/10.1016/j.biortech.2013.03.122
  29. Kang, C. K. "Technological consideration on the domestic production of high quality recycled semiconductor wastewater for industrial purpose", M.Sc. Dissertation. Major in Environmental Engineering Department of Environmental Engineering Graduate School of Environment & Public Health Youngnam University, 16-33 (2017).
  30. Chae, S., "Study for Optimization of Semiconductor Wastewater Treatment Process Including High Concentration of Nitrogen in Denitrificatino Tanks Using GPS-X Simnulator," J. KSET., 16(4), 269-278 (2015).
  31. Ryu, H. D., Lim, C. S., Kang, M. K., & Lee, S. I. "Evaluation of struvite obtained from semiconductor wastewater as a fertilizer in cultivating Chinese cabbage". J. Hazard. Mater. 221, 248-255 (2012). https://doi.org/10.1016/j.jhazmat.2012.04.038
  32. An, M. K., Woo, G. N., Kim, J. H., Kang, M. K., Ryu, H. D. and Lee, S. I., "Optimum Condition for Fluoride Removal Prior to the Application of Struvite Crystallization in Treating Semiconductor Wastewater," Journal of KSWE., 25(6), 916-921 (2009).
  33. An, B. M., Jeong, J. Y., Kim, J. H. and Park, J. Y., "Treatment of Semiconductor Wastewater using Bipolar ZVI Packed Bed Electrolytic Cell," KSCE Journal., 9-11 (2012).
  34. Chen, S. Y., Lu, L. A., and Lin, J. G., "Biodegradation of tetramethylammonium hydroxide (TMAH) in completely autotrophic nitrogen removal over nitrite (CANON) process," Bioresour. Technol., 210, 88-93 (2016). https://doi.org/10.1016/j.biortech.2016.01.127
  35. Innocenzi, V., Zueva, S., Prisciandaro, M., De Michelis, I., Di Renzo, A., Di Celso, G. M., & Veglio, F. "Treatment of TMAH solutions from the microelectronics industry: A combined process scheme". J. Water Process Eng., 31, 100780. (2019). https://doi.org/10.1016/j.jwpe.2019.100780
  36. Ferella, F., Innocenzi, V., Zueva, S., Corradini, V., Ippolito, N. M., Birloaga, I. P., ... & Veglio, F. "Aerobic treatment of waste process solutions from the semiconductor industry: From lab to pilot scale". Sustainability, 11(14), 3923. (2019). https://doi.org/10.3390/su11143923
  37. Heo, S. K., Nam, K. J., Loy-Benitez, and Yoo, C. K., "Data-Driven Hybrid Model for Forecasting Wastewater Influent Loads Based on Multimodal and Ensemble Deep Learning," IEEE Trans. Ind. Informatics., 17(10), 6925-6934 (2021). https://doi.org/10.1109/TII.2020.3039272
  38. Cho, B., "Synthesis of Removal Agent and Developement of Treatment Technology on Copper," Journal of the Korean Society of Industry Convergence, 16(2), 35-39 (2013). https://doi.org/10.21289/KSIC.2013.16.2.035
  39. Jeong, G. T., Park, S. H., Park, J. H., Lim, E. T., Bang, S. H., & Park, D. H. "Effect of factors of nitrification process in wastewater treatment". KSBB Journal, 24(3), 296-302. (2009).
  40. Bowker, R. P. G. and Stensel, D. H., "Design Manual Phosphorus Removal," EPA, 125-126 (1987).
  41. Park, H., "Improvement of the advanced treatment process in the present sewage treatment plants in Korea," M.Sc. Dissertation. Grad. Sch. Public Heal. Yonsei University, 38-47 (2009).
  42. Choi H. Y. and Park D. W., "A Study on Oxidation of Tetramethylammonium Hydroxide(TMAH) using UV/Persulfate," J. Korean Soc. Environ. Eng., 42(10), 443-451 (2020). https://doi.org/10.4491/ksee.2020.42.10.443
  43. B. Liu, K. Yoshinaga, J. Wub, W. Chen, M. Terashima, R. Goel, D. Pangallo and H. Yasui., "Kinetic analysis of biological degradation for tetramethylammonium hydroxide (TMAH) in the anaerobic activated sludge system at ambient temperature," Biochem. Eng. J., 114, 42-49 (2016). https://doi.org/10.1016/j.bej.2016.06.020
  44. Wu, Y. J., Irmayani, L., Setiyawan, A. A. and Whang, L. M.,"Aerobic degradation of high tetramethylammonium hydroxide (TMAH) and its impacts on nitrification and microbial community," Chemosphere, 258, 3-11 (2020).
  45. H. Cheng, C. Liu, Y. Lei, Y. Chiu, J. Mangalidan, C. Wu, Y. Wu and L. Whang., "Biological treatment of DMSO-containing wastewater from semiconductor industry under aerobic and methanogenic conditions," Chemosphere, 236, 2-23 (2019).
  46. Park, S. J., Yoon, T. J., Bae, J. H., Seo, H. J., and H. J. Park, "Biological treatment of wastewater containing dimethyl sulphoxide from the semi-conductor industry," Process Biochem., 36(6), 579-589 (2001). https://doi.org/10.1016/s0032-9592(00)00252-1
  47. Park, Y. S., "Study on Computer Simulations of Wastewater Treatment Process for Recovery of Isopropyl Alcohol (IPA) from Wafer Cleaning," Ph.D. Dissertation. Dep. Environ. Eng. Grad. Sch. Suwon University, 1-129 (2017).
  48. Hockenbury, M. R. and Grady, C. P. L., "Inhibition of nitrification: effects of selected organic compounds," J. Water Pollut. Control Fed., 49(5), 768-777 (1977).
  49. Steffan, R. J., McClay, K., Vainberg, S., Condee, C. W. and Zhang, D., "Biodegradation of the gasoline oxygenates methyl tert-butyl ether, ethyl tert-butyl ether, and tert-amyl methyl ether by propane-oxidizing bacteria," Appl. Environ. Microbiol., 63(11), 4216-4222 (1997). https://doi.org/10.1128/aem.63.11.4216-4222.1997
  50. Weon, K., "A Study on the Pre-treatment of Biological Processes for High-concentration Semiconductor Cleaning Wastewater," M.Sc. Dissertation. Major in Environmental Engineering Department of Process Engineering Graduate School of industry Chungbuk National University, 55-56 (2018).
  51. Michelis, D. I., Renzo, D. A., Saraullo, M. and Veglio, F., "Kinetic Study of Aerobic Degradation of Tetramethylammonium Hydroxide (Tmah) Waste Produced in Electronic Industries," DEStech Transactions on Envionment, Energy and Earth Sciences, 27-32 (2017).
  52. Lei, C., Whang, L., Chen, P., Lei, C., Whang, L. and Chen, P., "Biological treatment of thin-film transistor liquid crystal display (TFT-LCD) wastewater using aerobic and anoxic / oxic sequencing batch reactors Chemosphere Biological treatment of thin-film transistor liquid crystal display (TFT-LCD) wastewater usi," Chemosphere., 81(1), 57-64 (2010). https://doi.org/10.1016/j.chemosphere.2010.07.001
  53. Hayes, A. C., Liss, S. N., and Allen, D. G., "Growth kinetics of Hyphomicrobium and Thiobacillus spp. in mixed cultures degrading dimethyl sulfide and methanol," Appl. Environ. Microbiol., 76(16), 5423-5431 (2010). https://doi.org/10.1128/AEM.00076-10
  54. Geng, Y., Deng, Y., Chen, F., Jin, H., Tao, K. and Hou, T., "Biodegradation of isopropanol by a solvent-tolerant paracoccus denitrificans strain," Prep. Biochem. Biotechnol., 45(5), 491-499 (2015). https://doi.org/10.1080/10826068.2014.923452
  55. Lu, C., Chang, K. and Hsu, S., "A model for treating isopropyl alcohol and acetone mixtures in a trickle-bed air biofilter," Process Biochem., 39(12), 1849-1858 (2004). https://doi.org/10.1016/j.procbio.2003.09.019
  56. Raghuvanshi, S. and Gupta, S., "Growth Kinetics of Acclimated Mixed Culture for Degradation of Isopropyl Alcohol (IPA)," J. Biotechnol. Biomater., 13(2), 3-13 (2013)
  57. Carrero-Colon, M., Nakatsu, C. H. and Konopka, A., "Effect of nutrient periodicity on microbial community dynamics," Appl. Environ. Microbiol., 72(5), 3175-3183 (2006). https://doi.org/10.1128/AEM.72.5.3175-3183.2006