반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
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PSO알고리즘을 활용한 능동 제진 시스템 PID 오토 튜닝에 관한 연구

A Study on the Active Vibration Isolator PID Auto-tuning Using PSO Algorithm

  • 안일균 (한국공학대학교 IT반도체융합공학과) ;
  • 허헌 (한국공학대학교 메카트로닉스공학과) ;
  • 김효영 (한국공학대학교 메카트로닉스공학과) ;
  • 김기현 (한국공학대학교 메카트로닉스공학과)
  • An, Il Kyun (Department of IT Semiconductor Convergence, Tech University of Korea) ;
  • Huh, Heon (Department of Mechatronics Engineering, Tech University of Korea) ;
  • Kim, Hyo-Young (Department of Mechatronics Engineering, Tech University of Korea) ;
  • Kim, Kihyun (Department of Mechatronics Engineering, Tech University of Korea)
  • 투고 : 2022.11.11
  • 심사 : 2022.12.12
  • 발행 : 2022.12.31
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초록

Vibration is one of the factors that degrades the performance of equipment and measurement equipment used in high-tech industries such as semiconductors and display. The vibration isolator is classified into passive type and active type. The passive vibration isolator has the weakness of insufficient vibration isolation performance in the low frequency band, so an active vibration control system that can overcome these problems is used recently. In this paper, PID controller is used to control the active vibration isolator. Methods for setting the gain of the PID controller include the Zeigler-Nichols method, the pole placement method. These methods have the disadvantage of requiring a lot of time or knowing the system model accurately. This paper proposes the gain auto tuning method of the active vibration isolator applied with the PSO algorithm, which is an optimization algorithm that is easy to implement and has stable convergence performance with low calculations. It is expected that it will be possible to improve vibration isolation performance and reduce the time required for gain tuning by applying the proposed PSO algorithm to the active vibration isolator.

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과제정보

이 논문은 경기도의 경기도지역협력연구센터(GRRC) 사업[(GRRC TU Korea2020-B02), 이종소재 접합 제조공정 자동화를 위한 로봇 응용기술 개발]과 2022년도 정부(산업통상자원부)와 한국산업기술진흥원의 '한/체코 국제공동기술개발사업(No. P0019623)으로 수행된 연구 결과입니다.

참고문헌

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