반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

자동 표면 결함검사 시스템에서 Retro 광학계를 이용한 3D 깊이정보 측정방법

Linear System Depth Detection using Retro Reflector for Automatic Vision Inspection System

  • 주영복 (한국기술교육대학교 컴퓨터공학부)
  • Joo, Young Bok (Department of Computer Science & Engineering, Korea University of Technology & Education)
  • 투고 : 2022.11.18
  • 심사 : 2022.12.13
  • 발행 : 2022.12.31
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초록

Automatic Vision Inspection (AVI) systems automatically detect defect features and measure their sizes via camera vision. It has been populated because of the accuracy and consistency in terms of QC (Quality Control) of inspection processes. Also, it is important to predict the performance of an AVI to meet customer's specification in advance. AVI are usually suffered from false negative and positives. It can be overcome by providing extra information such as 3D depth information. Stereo vision processing has been popular for depth extraction of the 3D images from 2D images. However, stereo vision methods usually take long time to process. In this paper, retro optical system using reflectors is proposed and experimented to overcome the problem. The optical system extracts the depth without special SW processes. The vision sensor and optical components such as illumination and depth detecting module are integrated as a unit. The depth information can be extracted on real-time basis and utilized and can improve the performance of an AVI system.

키워드

과제정보

이 논문은 2021년도 한국기술교육대학교 교수 교육연구진흥과제 지원에 의하여 연구되었음.

참고문헌

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