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Corrosion Characteristics of Gold-Coated Silver Wire for Semiconductor Packaging

반도체 패키징용 금-코팅된 은 와이어의 부식특성

  • Hong, Won Sik (Electronic Convergence Materials & Device Research Center, Korea Electronics Technology Institute) ;
  • Kim, Mi-Song (Electronic Convergence Materials & Device Research Center, Korea Electronics Technology Institute) ;
  • Kim, Sang Yeop (Material Development Team, R&D Center, MK ELECTRON CO.,LTD.) ;
  • Jeon, Sung Min (Material Development Team, R&D Center, MK ELECTRON CO.,LTD.) ;
  • Moon, Jeong Tak (Material Development Team, R&D Center, MK ELECTRON CO.,LTD.) ;
  • Kim, Youngsik (School of Materials Science and Engineering, Andong National University)
  • 홍원식 (한국전자기술연구원 융복합전자소재연구센터) ;
  • 김미송 (한국전자기술연구원 융복합전자소재연구센터) ;
  • 김상엽 (엠케이전자(주) 기술연구소 재료개발팀) ;
  • 전성민 (엠케이전자(주) 기술연구소 재료개발팀) ;
  • 문정탁 (엠케이전자(주) 기술연구소 재료개발팀) ;
  • 김영식 (국립안동대학교 신소재공학부)
  • Received : 2021.09.30
  • Accepted : 2021.10.15
  • Published : 2021.10.31

Abstract

In this study, after measuring polarization characteristics of 97.3 wt% Ag, Au-Coated 97.3 wt% Ag (ACA) and 100 wt% Au wires in 1 wt% H2SO4 and 1 wt% HCl electrolytes at 25 ℃, corrosion rate and corrosion characteristics were comparatively analyzed. Comparing corrosion potential (ECORR) values in sulfuric acid solution, ACA wire had more than six times higher ECORR value than Au wire. Thus, it seems possible to use a broad applied voltage range of bonding wire for semiconductor packaging which ACA wire could be substituted for the Au wire. However, since the ECORR value of ACA wire was three times lower than that of the Au wire in a hydrochloric acid solution, it was judged that the use range of the applied voltage and current of the bonding wire should be considered. In hydrochloric acid solution, 97.3 wt% Ag wire showed the highest corrosion rate, while ACA and Au showed similar corrosion rates. Additionally, in the case of sulfuric acid solution, all three types showed lower corrosion rates than those under the hydrochloric acid solution environment. The corrosion rate was higher in the order of 97.3 wt% Ag > ACA > 100 wt% Au wires.

Keywords

Acknowledgement

본 연구는 경기도와 (재)차세대융합기술원에서 지원한 소재·부품·장비산업 자립화 연구지원사업(과제번호: AICT-010-T2)의 지원을 받아 수행된 연구결과입니다.

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