한국재료학회지 (Korean Journal of Materials Research)

  • 제31권10호
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  • Pages.546-551
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  • 2021
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  • 1225-0562(pISSN)
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  • 2287-7258(eISSN)
한국재료학회 (Materials Research Society of Korea)
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유리-PZT 혼합 후막의 절연 파괴 전압 및 에너지 저장 효율 향상

Enhancing Breakdown Strength and Energy Storage Efficiency of Glass-Pb(Zr,Ti)O3 Composite Film

  • 김삼정 (인하대학교 신소재공학과) ;
  • 임지호 (인하대학교 신소재공학과) ;
  • 정대용 (인하대학교 신소재공학과)
  • Kim, Samjeong (Department of Materials Science and Engineering, Inha University) ;
  • Lim, Ji-Ho (Department of Materials Science and Engineering, Inha University) ;
  • Jeong, Dae-Yong (Department of Materials Science and Engineering, Inha University)
  • 투고 : 2021.06.02
  • 심사 : 2021.09.02
  • 발행 : 2021.10.27
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초록

To improve ferroelectric properties of PZT, many studies have attempted to fabricate dense PZT films. The AD process has an advantage for forming dense ceramic films at room temperature without any additional heat treatment in low vacuum. Thick films coated by AD have a higher dielectric breakdown strength due to their higher density than those coated using conventional methods. To improve the breakdown strength, glass (SiO2-Al2O3-Y2O3, SAY) is mixed with PZT powder at various volume ratios (PZT-xSAY, x = 0, 5, 10 vol%) and coating films are produced on silicon wafers by AD method. Depending on the ratio of PZT to glass, dielectric breakdown strength and energy storage efficiency characteristics change. Mechanical impact in the AD process makes the SAY glass more viscous and fills the film densely. Compared to pure PZT film, PZT-SAY film shows an 87.5 % increase in breakdown strength and a 35.3 % increase in energy storage efficiency.

키워드

과제정보

This study was supported by the National Research Foundation of Korea (Grant No. 2021R1F1A1062334).

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