Applied Microscopy

  • Volume 51
  • /
  • Pages.10.1-10.9
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  • 2021
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  • 2287-5123(pISSN)
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  • 2287-4445(eISSN)
Korean Society of Microscopy (한국현미경학회)
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Sensitivity of quantitative symmetry measurement algorithms for convergent beam electron diffraction technique

  • Hyeongsub So (Korea-Russia Innovation Center, Korea Institute of Industrial Technology) ;
  • Ro Woon Lee (Korea-Russia Innovation Center, Korea Institute of Industrial Technology) ;
  • Sung Taek Hong (Korea-Russia Innovation Center, Korea Institute of Industrial Technology) ;
  • Kyou-Hyun Kim (Korea-Russia Innovation Center, Korea Institute of Industrial Technology)
  • Received : 2021.06.04
  • Accepted : 2021.06.23
  • Published : 2021.12.31
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Abstract

We investigate the sensitivity of symmetry quantification algorithms based on the profile R-factor (Rp) and the normalized cross-correlation (NCC) coefficient (γ). A DM (Digital Micrograph©) script embedded in the Gatan digital microscopy software is used to develop the symmetry quantification program. Using the Bloch method, a variety of CBED patterns are simulated and used to investigate the sensitivity of symmetry quantification algorithms. The quantification results show that two symmetry quantification coefficients are significantly sensitive to structural changes even for small strain values of < 1%.

Keywords

Acknowledgement

This work was supported by a research program funded by the Korea Institute of Industrial Technology (KITECH).

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