Nuclear Engineering and Technology

  • 제53권6호
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  • Pages.1939-1941
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  • 2021
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  • 1738-5733(pISSN)
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  • 2234-358X(eISSN)
한국원자력학회 (Korean Nuclear Society)
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Study on sputtering yield of tungsten with different particle sizes: Surface roughness dependence

  • 투고 : 2020.11.14
  • 심사 : 2020.12.27
  • 발행 : 2021.06.25
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초록

The sputtering yield of tungsten pellets composed of different particle sizes of <1, 12, 44-74, and 149-297 ㎛ was systematically investigated by bombardment with Ar+ ions accelerated at 2.0 keV in an ultra-high vacuum chamber. We found that the tungsten sample fabricated from larger particles had a higher surface roughness, based on the surface profile results. Using the data of the surface roughness for the four types of tungsten pellets, we confirmed that the sputtering yield for a tungsten pellet with the highest surface roughness was 7 times lower than that of the lowest surface roughness. This could be due to the redeposition of sputtered tungsten particles onto neighboring asperities.

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과제정보

This research was funded by the National Research Foundation of Korea (NRF) funded by the Korean government (MSIP), grant number 2019M1A7A1A02085179. This work also supported by the 2020 Yeungnam University Research Grant.

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