한국표면공학회지 (Journal of the Korean institute of surface engineering)

  • 제54권3호
  • /
  • Pages.119-123
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  • 2021
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  • 1225-8024(pISSN)
  • /
  • 2288-8403(eISSN)
한국표면공학회 (The Korean Institute of Surface Engineering)
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Ag 중간층이 SnO2 박막의 광학적, 전기적 특성에 미치는 영향

Influence of Ag Interlayer on the Optical and Electrical Properties of SnO2 Thin Films

  • 장진규 (울산대학교 첨단소재공학부) ;
  • 김현진 (울산대학교 첨단소재공학부) ;
  • 최재욱 (울산대학교 첨단소재공학부) ;
  • 이연학 (울산대학교 첨단소재공학부) ;
  • 허성보 (한국생산기술연구원 동남본부 에너지소재부품연구그룹) ;
  • 김유성 (한국생산기술연구원 울산본부 첨단정형공정그룹) ;
  • 공영민 (울산대학교 첨단소재공학부) ;
  • 김대일 (울산대학교 첨단소재공학부)
  • Jang, Jin-Kyu (School of Materials Science and Engineering, University of Ulsan) ;
  • Kim, Hyun-Jin (School of Materials Science and Engineering, University of Ulsan) ;
  • Choi, Jae-Wook (School of Materials Science and Engineering, University of Ulsan) ;
  • Lee, Yeon-Hak (School of Materials Science and Engineering, University of Ulsan) ;
  • Heo, Sung-Bo (Korea Institute of Industrial Technology) ;
  • Kim, Yu-Sung (Korea Institute of Industrial Technology) ;
  • Kong, Young-Min (School of Materials Science and Engineering, University of Ulsan) ;
  • Kim, Daeil (School of Materials Science and Engineering, University of Ulsan)
  • 투고 : 2021.05.23
  • 심사 : 2021.06.28
  • 발행 : 2021.06.30
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초록

SnO2 single layer and SnO2/Ag/SnO2 (SAS) tri-layered films were deposited on the glass substrate by RF and DC magnetron sputtering at room temperature and then the effect of Ag interlayer on the opto-electrical performance of the films were considered. As deposited SnO2 films show a visible transmittance of 85.5 % and a sheet resistance of 1.2×104 Ω/□, the SAS films with a 15 nm thick Ag interlayer show a lower resistance of 18.8 Ω/□ and a visible transmittance of 70.6 %, respectively. The figure of merit based on the optical transmittance and sheet resistance revealed that the Ag interlayer in the SnO2 films enhances the opto-electrical performance without substrate heating or annealing process.

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과제정보

이 논문은 2021년도 정부(교육부)의 재원으로 한국연구재단의 지원을 받아 수행된 기초연구사업임(2018R1D1A1B07051003).

참고문헌

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