과제정보
본 연구는 산업통상자원부(10080450)와 KSRC 지원사업인 미래반도체소자 원천기술개발사업의 연구결과로 수행되었고, 2021년도 정부(산업통상자원부)의 재원으로 한국산업기술진흥원의 지원을 받아 수행된 연구임.
참고문헌
- M. T. Bohr, Solid State Technol., 39, 105 (1996).
- B. Li, T. D. Sullivan, T. C. Lee, and D. Badami, Microelectron. Reliab., 44, 365 (2004). [DOI: https://doi.org/10.1016/j.microrel.2003.11.004]
- N. Awaya and Y. Arita, J. Electron. Mater., 21, 959 (1992). [DOI: https://doi.org/10.1007/BF02684203]
- A. Jain, T. T. Kodas, R. Jairath, and M. J. Hampden-Smith, J. Vac. Sci. Technol., B: Nanotechnol. Microelectron.: Mater., Process., Meas., Phenom., 11, 2107 (1993). [DOI: https://doi.org/10.1116/1.586550]
- S. P. Murarka and S. W. Hymes, Crit. Rev. Solid State Mater. Sci., 20, 87 (1995). [DOI: https://doi.org/10.1080/10408439508243732]
- S. Lee and Y. Kuo, J. Electrochem. Soc., 148, G524 (2001). [DOI: https://doi.org/10.1149/1.1392324]
- O. J. Kwon, S. K. Cho, and J. J. Kim, Korean Chem. Eng. Res., 47, 141 (2009).
- P. A. Tamirisa, G. Levitin, N. S. Kulkarni, and D. W. Hess, Microelectron. Eng., 84, 105 (2007). [DOI: https://doi.org/10.1016/j.mee.2006.08.012]
- S. Rakheja, S. C. Chang, and A. Naeemi, IEEE Trans. Electron Devices, 60, 3913 (2013). [DOI: https://doi.org/10.1109/TED.2013.2282615]
- K. Ohno, M. Sato, and Y. Arita, J. Electrochem. Soc., 143, 4089 (1996). [DOI: https://doi.org/10.1149/1.1837341]
- B. J. Howard and C. Steinbruchel, Appl. Phys. Lett., 59, 914 (1991). [DOI: https://doi.org/10.1063/1.106299]
- S. Lee and Y. Kuo, Thin Solid Films, 457, 326 (2004). [DOI: https://doi.org/10.1016/j.tsf.2003.10.011]
- F. Wu, G. Levitin, and D. Hess, ECS Trans., 33, 157 (2010). [DOI: https://doi.org/10.1149/1.3501042]
- E. T. Lim, J. S. Ryu, J. S. Choi, and C. W. Chung, Vacuum, 167, 145 (2019). [DOI: https://doi.org/10.1016/j.vacuum.2019.05.046]
- J. S. Ryu, E. T. Lim, J. S. Choi, and C. W. Chung, Thin Solid Films, 672, 55 (2019). [DOI: https://doi.org/10.1016/j.tsf.2018.12.042]
- M. H. Cha, E. T. Lim, S. Y. Park, J. S. Lee, and C. W. Chung, Vacuum, 181, 109421 (2020). [DOI: https://doi.org/10.1016/j.vacuum.2020.109421]
- M. C. Biesinger, Surf. Interface Anal., 49, 1325 (2017). [DOI: https://doi.org/10.1002/sia.6239]
- E. Cano, J. M. Bastidas, J. L. Polo, and N. Mora, J. Electrochem. Soc., 148, B431 (2001). [DOI: https://doi.org/10.1149/1.1404968]
- A. Cano, Y. Avila, M. Avila, and E. Reguera, J. Solid State Chem., 276, 339 (2019). [DOI: https://doi.org/10.1016/j.jssc.2019.05.021]
- G. C. Allen, F. Sorbello, C. Altavilla, A. Castorina, and E. Ciliberto, Thin Solid Films, 483, 306 (2005). [DOI: https://doi.org/10.1016/j.tsf.2004.12.062]
- G. Beamson and D. Briggs, High Resolution XPS of Organic Polymers: The Scienta ESCA300 Database (John Wiley & Sons, New York, 1992) p. 182.
- M. Barber, J. A. Connor, M. F. Guest, I. H. Hillier, M. Schwarz, and M. Stacey, J. Chem. Soc., Faraday Trans. 2, 69, 551 (1973). [DOI: https://doi.org/10.1039/F29736900551]
- S. S. Chang, H. J. Lee, and H. J. Park, Ceram. Int., 31, 411 (2005). [DOI: https://doi.org/10.1016/j.ceramint.2004.05.027]