Current Optics and Photonics

Optical Society of Korea (한국광학회)
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Reflective Fourier Ptychographic Microscopy Using Segmented Mirrors and a Mask

  • Ahn, Hee Kyung (Optical Imaging and Metrology Team, Korea Research Institute of Standards and Science) ;
  • Chon, Byong Hyuk (Optical Imaging and Metrology Team, Korea Research Institute of Standards and Science)
  • Received : 2020.10.16
  • Accepted : 2020.12.18
  • Published : 2021.02.25
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Abstract

In this paper, LED arrays with segmented mirrors and a mask are presented as a new dark-field illuminator for reflective Fourier ptychographic microscopy (FPM). The illuminator can overcome the limitations of the size and the position of samples that the dark-field illuminator using a parabolic mirror has had. The new concept was demonstrated by measuring a USAF 1951 target, and it resolved a pattern in group 10 element 6 (274 nm) in the USAF target. The new design of the dark-field illuminator can enhance competitiveness of the reflective FPM as a versatile measurement method in industry.

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References

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