Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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High-sensitivity ZnO gas Sensor with a Sol-gel-processed SnO2 Seed Layer

Sol-Gel 방법으로 제작된 SnO2 seed layer를 적용한 고반응성 ZnO 가스 센서

  • Kim, Sangwoo (Department of Smart Interdisciplinary Engineering, Pusan National University) ;
  • Bak, So-Young (Department of Electronics Engineering, Pusan National University) ;
  • Han, Tae Hee (Department of Smart Interdisciplinary Engineering, Pusan National University) ;
  • Lee, Se-Hyeong (Department of Electronics Engineering, Pusan National University) ;
  • Han, Ye-ji (Department of Smart Interdisciplinary Engineering, Pusan National University) ;
  • Yi, Moonsuk (Department of Electronics Engineering, Pusan National University)
  • 김상우 (부산대학교 스마트 융합공학과) ;
  • 박소영 (부산대학교 전자공학과) ;
  • 한태희 (부산대학교 스마트 융합공학과) ;
  • 이세형 (부산대학교 전자공학과) ;
  • 한예지 (부산대학교 스마트 융합공학과) ;
  • 이문석 (부산대학교 전자공학과)
  • Received : 2020.09.16
  • Accepted : 2020.11.04
  • Published : 2020.11.30
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Abstract

A metal oxide semiconductor gas sensor is operated by measuring the changes in resistance that occur on the surface of nanostructures for gas detection. ZnO, which is an n-type metal oxide semiconductor, is widely used as a gas sensor material owing to its high sensitivity. Various ZnO nanostructures in gas sensors have been studied with the aim of improving surface reactions. In the present study, the sol-gel and vapor phase growth techniques were used to fabricate nanostructures to improve the sensitivity, response, and recovery rate for gas sensing. The sol-gel method was used to synthesize SnO2 nanoparticles, which were used as the seed layer. The nanoparticles size was controlled by regulating the process parameters of the solution, such as the pH of the solution, the type and amount of solvent. As a result, the SnO2 seed layer suppressed the aggregation of the nanostructures, thereby interrupting gas diffusion. The ZnO nanostructures with a sol-gel processed SnO2 seed layer had larger specific surface area and high sensitivity. The gas response and recovery rate were 1-7 min faster than the gas sensor without the sol-gel process. The gas response increased 4-24 times compared to that of the gas sensor without the sol-gel method.

Keywords

References

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