한국분말재료학회지 (Journal of Powder Materials)

  • 제27권4호
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  • Pages.293-299
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  • 2020
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  • 2799-8525(pISSN)
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  • 2799-8681(eISSN)
한국분말재료학회 (*구 분말야금학회) (The Korean Powder Metallurgy & Materials Institute)
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W-WC의 Spark Plasma Sintering에 의한 W2C의 합성 및 식각특성

Synthesis of W2C by Spark Plasma Sintering of W-WC Powder Mixture and Its Etching Property

  • 오규상 (한국세라믹기술원 이천분원 엔지니어링세라믹센터) ;
  • 이성민 (한국세라믹기술원 이천분원 엔지니어링세라믹센터) ;
  • 류성수 (한국세라믹기술원 이천분원 엔지니어링세라믹센터)
  • Oh, Gyu-Sang (Engineering Ceramics Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Lee, Sung-Min (Engineering Ceramics Center, Korea Institute of Ceramic Engineering and Technology) ;
  • Ryu, Sung-Soo (Engineering Ceramics Center, Korea Institute of Ceramic Engineering and Technology)
  • 투고 : 2020.06.16
  • 심사 : 2020.08.18
  • 발행 : 2020.08.28
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초록

W2C is synthesized through a reaction-sintering process from an ultrafine-W and WC powder mixture using spark plasma sintering (SPS). The effect of various parameters, such as W:WC molar ratio, sintering temperature, and sintering time, on the synthesis behavior of W2C is investigated through X-ray diffraction (XRD) analysis, scanning electron microscopy (SEM) analysis of the microstructure, and final sintered density. Further, the etching properties of a W2C specimen are analyzed. A W2C sintered specimen with a particle size of 2.0 ㎛ and a relative density over 98% could be obtained from a W-WC powder mixture with 55 mol%, after SPS at 1700℃ for 20 min under a pressure of 50 MPa. The sample etching rate is similar to that of SiC. Based on X-ray photoelectron spectroscopy (XPS) analysis, it is confirmed that fluorocarbon-based layers such as C-F and C-F2 with lower etch rates are also formed.

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참고문헌

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