Journal of Semiconductor Engineering

The Institute of Semiconductor Engineers (반도체공학회)
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Inorganic Materials and Process for Bioresorbable Electronics

  • Seo, Min-Ho (Center for Bio-Integrated Electronics, Northwestern University) ;
  • Jo, Seongbin (Chemical and Biomolecular Engineering, University of Illinois at Urbana-Champaign) ;
  • Koo, Jahyun (School of Biomedical Engineering, Korea University)
  • Received : 2020.06.08
  • Accepted : 2020.06.09
  • Published : 2020.06.30
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Abstract

This article highlights new opportunities of inorganic semiconductor materials for bio-implantable electronics, as a subset of 'transient' technology defined by an ability to physically dissolve, chemically degrade, or disintegrate in a controlled manner. Concepts of foundational materials for this area of technology with historical background start with the dissolution chemistry and reaction kinetics associated with hydrolysis of nanoscale silicon surface as a function of temperature and pH level. The following section covers biocompatibility of silicon, including related other semiconductor materials. Recent transient demonstrations of components and device levels for bioresorbable implantation enable the future direction of the transient electronics, as temporary implanters and other medical devices that provide important diagnosis and precisely personalized therapies. A final section outlines recent bioresorbable applications for sensing various biophysical parameters, monitoring electrophysiological activities, and delivering therapeutic signals in a programmed manner.

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