Acknowledgement
본 연구는 기계산업핵심기술개발사업 "고출력 전자빔을 이용한 고세장비 미세홀 가공장비 및 공정기술개발" 과제번호(10063367) 연구비 지원으로 진행되었습니다. 이에 감사를 드립니다.
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