한국표면공학회지 (Journal of the Korean institute of surface engineering)

  • 제53권3호
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  • Pages.116-123
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  • 2020
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  • 1225-8024(pISSN)
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  • 2288-8403(eISSN)
한국표면공학회 (The Korean Institute of Surface Engineering)
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알곤 이온빔 입사각에 따른 Polyethylene Naphthalate 필름 표면의 자가나노구조화 분석

Effect of Argon Ion Beam Incident Angle on Self-Organized Nanostructure on the Surface of Polyethylene Naphthalate Film

  • 조경환 (재료연구소 표면기술연구본부) ;
  • 양준영 (재료연구소 표면기술연구본부) ;
  • 변은연 (재료연구소 표면기술연구본부) ;
  • 박영배 (안동대학교 신소재공학부 청정에너지소재기술연구센터) ;
  • 정성훈 (재료연구소 표면기술연구본부) ;
  • 김도근 (재료연구소 표면기술연구본부) ;
  • 이승훈 (재료연구소 표면기술연구본부)
  • Joe, Gyeonghwan (Surface Technology Division, Korea Institute of Materials Science) ;
  • Yang, Junyeong (Surface Technology Division, Korea Institute of Materials Science) ;
  • Byeon, Eun-Yeon (Surface Technology Division, Korea Institute of Materials Science) ;
  • Park, Young-Bae (School of Materials Science and Engineering, Andong National University) ;
  • Jung, Sunghoon (Surface Technology Division, Korea Institute of Materials Science) ;
  • Kim, Do-Geun (Surface Technology Division, Korea Institute of Materials Science) ;
  • Lee, Seunghun (Surface Technology Division, Korea Institute of Materials Science)
  • 투고 : 2020.04.20
  • 심사 : 2020.06.25
  • 발행 : 2020.06.30
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초록

Ion beam irradiation induces self-organization of nanostructure on the surface of polymer film. We show that the incident angle of Ar ions on polyethylene naphthalate(PEN) film changes self-organized nanostructure. PEN film was irradiated by argon ion beams with the ion incident angle of 0°, 30°, 45°, 60°, and 80°. Nanostructure was altered from dimple to ripple structure as the angle increases. The ripple structure changed to pillar structure after 60°due to that the shallow incident angle increased the ion energy transfer per depth up to 50 eV/Å, which value could induce excessive surface heating and oligomer formation reacting as a physical mask for anisotropic etching. And quantitative analysis of the nanostructures was adapted by using ABC model and fractal dimension theory.

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