한국표면공학회지 (Journal of the Korean institute of surface engineering)

  • 제53권3호
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  • Pages.104-108
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  • 2020
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  • 1225-8024(pISSN)
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  • 2288-8403(eISSN)
한국표면공학회 (The Korean Institute of Surface Engineering)
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Au 층간박막 두께에 따른 ZnO 박막의 전기광학적 특성 변화

Influence of Au Interlayer Thickness on the Opto-Electrical Properties of ZnO Thin Films

  • 박윤제 (울산대학교 첨단소재공학부) ;
  • 최수현 (울산대학교 첨단소재공학부) ;
  • 김유성 (한국생산기술연구원 첨단정형공정그룹) ;
  • 차병철 (한국생산기술연구원 첨단정형공정그룹) ;
  • 공영민 (울산대학교 첨단소재공학부) ;
  • 김대일 (울산대학교 첨단소재공학부)
  • Park, Yun-Je (School of Materials Science and Engineering, University of Ulsan) ;
  • Choe, Su-Hyeon (School of Materials Science and Engineering, University of Ulsan) ;
  • Kim, Yu-Sung (Advanced Forming Processes R&D Group, Korea Institute of Industrial Technology) ;
  • Cha, Byung-Chul (Advanced Forming Processes R&D Group, Korea Institute of Industrial Technology) ;
  • Gong, Young-Min (School of Materials Science and Engineering, University of Ulsan) ;
  • Kim, Daeil (School of Materials Science and Engineering, University of Ulsan)
  • 투고 : 2020.06.01
  • 심사 : 2020.06.28
  • 발행 : 2020.06.30
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초록

ZnO single layer films (100 nm thick) and Au intermediated ZnO films (ZnO/Au/ZnO; ZAZ) were deposited on the glass substrate by RF and DC magnetron sputtering at room temperature and then the influence of the Au interlayer on the electrical and optical properties of the films were investigated. ZnO thin films show the visible transmittance of 90.3 % and sheet resistance of 63.2×108 Ω/□. In ZAZ films, as Au interlayer thickness increased from 6 to 10 nm, the sheet resistance decreased from 58.3×108 to 48.6 Ω/□, and the visible transmittance decreased from 84.2 to 73.9 %. From the observed results, it can be concluded that the intermediate Au thin film enhances the opto-electrical performance of ZnO films without intentional substrate heating.

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참고문헌

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