반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

플렉시블 OLED 패시베이션용 유기 박막 제작 및 특성

Fabrication of Organic Thin Film for Flexible OLED Passivation and Its Characterization

  • 김관도 (평택대학교 융합소프트웨어학과)
  • Kim, Kwan-Do (Dept. of Convergence Software, PyeongTaek University)
  • 투고 : 2020.03.23
  • 심사 : 2020.03.24
  • 발행 : 2020.03.31
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초록

Polyimide thin film was prepared by annealing the polyamic acid that was synthesized through co-deposition of diamine and dianhydride. The polyamic acid and polyimide thin film were characterized with FT-IR and HR FE-SEM. The average roughness of the film surface, evaluated with AFM, were 0.385 nm and 0.299 nm after co-deposition, and annealing at 120 ℃ respectively. OLED was passivated with the polyimide layer of 200 nm thickness. While the inorganic passivation layer enhances the WVTR of OLED, the organic passivation layer gives flexibility to the OLED. The in-situ passivation of OLED with organic thin film layer provides the leading technique to develop flexible OLED Display.

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참고문헌

  1. A. P. Ghosh, L. J. Gerenser, C. M. Jarman, and J. E. Fornalik, "Thin-film encapsulation of organic lightemitting devices", Appl. Phys. Lett., 86, 223503, 2005. https://doi.org/10.1063/1.1929867
  2. T. W. Kim et al., "Transparent hybrid inorganic/organic barrier coatings for plastic organic light-emitting diode substrate", J. Vac. Sci. Technol. A, Vol. 23, No. 4, 971, 2005. https://doi.org/10.1116/1.1913680
  3. G. L. Graff, R. E. Williford, and P. E. Burrows, "Machanisms of vapor permeation through multilayer barrier films: Lag time versus equilibrium permeation", Journal of Applied Physics, Vol. 96, No. 4, 1840, 2004. https://doi.org/10.1063/1.1768610
  4. F. L. Wong, M. K. Fung, S. L. Tao, S. L. Lai, W. M. Tsang, K. H. Kong, W. M. Choy, C. S. Lee, and S. T. Lee, "Long-lifetime thin-film encapsulated organic light-emitting diodes", Journal of the Applied Physics, 104, 014509, 2008. https://doi.org/10.1063/1.2940727
  5. Jay S. Lewis and Michael S. Waver, "Thin-Film Permeation-Barrier Technology for Flexible Organic Ligth-Emitting Devices", IEEE Journal on Selected Topics in Quantum Electronics, Vol. 10, No. 1, 45 2004. https://doi.org/10.1109/JSTQE.2004.824072
  6. Hiroaki Usui, Megumi Watanabe, Chizuru Arai, Katsusuke Hibi and Kuniaki Tanaka, "Vapor Deposition Polymerization of a Polyimide Containing Perylene Units Characterized by Displacement Current Measurement", Jpn. J. Appl. Phys., Vol. 44, No. 4B, 2810, 2005. https://doi.org/10.1143/JJAP.44.2810
  7. Sadayuki Ukishima, Masayuki Iijima, Masatoshi Sato, Yoshikazu Takahashi, and Eiichi Fukuda, "Heat resistant polyimide films with low dielectric constant by vapor deposition polymerization", Thin Solid Films, 308-309, 475, 1997. https://doi.org/10.1016/S0040-6090(97)00438-0
  8. Eung Ki Lee, "Study on Optimization of the Vacuum Evaporation Process for OLED," Journal of the Semiconductor & Display Technology, Vol. 7, No. 1, pp.35-40, 2008.
  9. Leung Ki Lee, "Evaporation Process Modeling for Large OLED Mass-fabrication System," Journal of the Semiconductor & Display Technology, Vol. 5, No. 4, pp.29-34, 2006.
  10. Youngcheol Joo, Choong Hwan Han, Tai Joon Um, Sang Wook Lee and Kug Weon Kim, "Thermal Performance Analysis of Circular Source for OLED Vapor Deposition", Journal of the Semiconductor & Display Technology, Vol. 6, No. 4, pp. 39-42, 2007.