Abstract
In order to reduce the manufacturing cost of MCU chips used in applications such as wireless chargers and USB-C, compared to DP-EEPROM (Double Poly EEPROM), which requires 3 to 5 additional process masks, it is even more necessary MTP(Multi-Time Programmable), which is less than one additional mask and have smaller unit cell size. In addition, in order to improve endurance characteristics and data retention characteristics of the MTP memory cell due to E/P(Erase / Program) cycling, the distribution of the VTP(Program Threshold Voltage) and the VTE(Erase Threshold Voltage) needs to be narrow. In this paper, we proposed a current-type BL S/A(Bit-Line Sense Amplifier) circuit, WM(Write Mask) circuit, BLD(BL Driver) circuit and a algorithm, which can reduce the distribution of program and VT and erase VT, through compare the target current by performing the erase and program pulse of the short pulse several times, and if the current specification is satisfied, the program or erase operation is no longer performed. It was confirmed that the 256Kb MTP memory fabricated in the Magnachip semiconductor 0.13㎛ process operates well on the wafer in accordance with the operation mode.
무선충전기, USB 타입-C 등의 응용에 사용되는 MCU 칩은 제조 원가를 줄이기 위해 3~5개의 추가 공정 마스크가 필요한 DP-EEPROM(Double Poly EEPROM)보다는 추가 마스크가 한 장 이내이면서 메모리 셀 사이즈가 작은 MTP(Multi-Time Programmable) 메모리가 요구된다. 그리고 E/P(Erase/Program) cycling에 따른 MTP 메모리 셀의 endurance 특성과 데이터 retention 특성을 좋게 하기 위해서 VTP(Program Threshold Voltage)와 VTE(Erase Threshold Voltage)의 산포는 좁은 것이 필요하다. 그래서 본 논문에서는 short pulse의 erase와 program pulse를 여러 번 수행하면서 목표 전류와 비교한 뒤 전류스펙을 만족하면 더 이상 program이나 erase 동작을 수행하지 않게 하므로 program VT 산포나 erase VT 산포를 줄이는 알고리즘과 current-type BL S/A(Bit-Line Sense Amplifier) 회로, WM(Write Mask) 회로, BLD(BL Driver) 회로를 제안하였다. 매그나칩반도체 0.13㎛ 공정으로 제작된 256Kb MTP 메모리 웨이퍼에서 동작 모드에 맞게 정상적으로 동작하는 것을 확인할 수 있다.