Journal of Industrial Technology (산업기술연구)

Kangwon National University, Institute of Industrial Technology (강원대학교 산업기술연구소)
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Effect of substrate pretreatment on the growth yield enhancement and growth temperature decrease of carbon nanotubes

탄소나노튜브의 합성수율 증대와 저온 합성에 미치는 기판 전처리의 영향

  • Shin, Eui-Chul (J&L Tech) ;
  • Jo, Sung-Il (Department of Advanced Materials Science and Engineering, Kangwon National University) ;
  • Jeong, Goo-Hwan (Department of Advanced Materials Science and Engineering, Kangwon National University)
  • Received : 2019.09.17
  • Accepted : 2019.10.18
  • Published : 2019.10.31
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Abstract

Carbon nanotubes (CNT) on metal substrates are definitely beneficial because they can maintain robust mechanical stability and high conductivity between CNT and metal interfaces. Here, we report direct growth of CNT on Ni-based superalloy, Inconel 600, using thermal chemical vapor deposition (CVD) with acetylene feedstock in the growth temperature range of $400-725^{\circ}C$. Furthermore, we studied the effect of substrate pretreatment on the growth yield enhancement and growth temperature decrease of CNT on Inconel 600. Activation energy (AE) for CNT growth was estimated from the CNT height change with respect to the growth temperature. The AE values significantly decreased from 205.03 to 24.35 kJ/mol by the pretreatment of thermal oxidation of Inconel substrate at $725^{\circ}C$ under ambient. Higher oxidation temperature tends to have lower activation energy. The results have shown the importance of pretreatment temperature on CNT growth yield and growth temperature decrease.

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