Journal of the Korean institute of surface engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
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Arrayed Tip based Pattern Lithography with Built-in Capacitive Proximal Leveling Sensor

내장형 정전용량 근접 센서를 이용한 다중 팁 기반 패턴 인쇄

  • Han, Yoonsoo (Engineering Ceramic Center, Korea Institute of Ceramic Engineering and Technology (Icheon))
  • 한윤수 (한국세라믹기술원 엔지니어링세라믹센터)
  • Received : 2019.10.22
  • Accepted : 2019.10.29
  • Published : 2019.10.31
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Abstract

To increase the throughput of tip-based nanolithography (TBN), one approach is to use a large array of such tips working in parallel. It is important to maintain co-planarity between the tip array and the writing surface. A slight misalignment can cause large discrepancies of contact force and feature sizes. We report a capacitive proximity sensor built-in with the TBN array for leveling an arrayed polymer pen array. The device allows alignment between an array of writing tips and the writing substrate without contact and contamination. The angular sensitivity of the sensor is $0.05^{\circ}$ for an array with maximum tip-to-tip separation of 100 mm.

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References

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