공업화학 (Applied Chemistry for Engineering)

  • 제30권5호
  • /
  • Pages.523-529
  • /
  • 2019
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  • 1225-0112(pISSN)
  • /
  • 2288-4505(eISSN)
한국공업화학회 (The Korean Society of Industrial and Engineering Chemistry)
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Display 제조공정 배출가스 처리를 위한 휘발성 유기화합물 전처리 장치 개발

Development of Volatile Organic Compound Pretreatment Device for Removing Exhaust Gas from Display Manufacturing Process

  • Moon, Gi-Hak (Department of Environmental Engineering, Chungbuk National University) ;
  • Kim, Jae-Yong (Department of Environmental Engineering, Chungbuk National University)
  • 투고 : 2018.12.07
  • 심사 : 2019.01.28
  • 발행 : 2019.10.10
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초록

본 연구에서는 최근 반도체 및 display 산업이 발달함에 따라 문제가 되고 있는 휘발성 유기화합물의 전처리에 관해 조사하였다. 일반적인 VOCs 처리 설비인 직접연소장치에 사용되는 농축기는 display 제조 공정 내 배출가스에 의해 쉽게 오염되어 성능저하를 일으키며 결과적으로 VOCs의 처리 효율을 떨어뜨린다. 배출가스 성분 분석 결과 고비점, 고점도, 고분자량의 Alcohol류 및 Oil 성분이 다량 검출되었다. 이에 전처리 설비 내 열교환기를 이용하여 농축기 성능저하 물질을 응축시켜 처리하고자 하였고, 대부분의 물질을 90% 이상 처리하였다. 또한 열교환기에서 재 비산되는 고분자 Oil 등은 후처리 설비로 Grease Filter를 장착하여 대부분 처리할 수 있는 것으로 확인되었다.

In this study, we investigated the pretreatment technologies of volatile organic compounds (VOCs) which is a problem as the semiconductor and display industry develops recently. The conventional concentrator used in the direct combustion system, is easily contaminated by the exhaust gas in the manufacturing process of the display, resulting in the low treatment efficiency of generated VOCs. Physical/Chemical analyses of the exhaust gas showed high boiling point and viscosity in addition to a large amount of molecular weight alcohols and oil components. In this study, we tried to treat degrading materials by using the heat exchanger in a pretreatment facility and some materials degrading the concentrator were condensed more than 90%. In addition, it was also confirmed that an auxiliary device of the grease filter could remove the redispersion polymer oil from the heat exchanger.

키워드

참고문헌

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