Fig. 1. Sensor module design
Fig. 2. Beam shaping optics design
Fig. 3. Telescope design
Fig. 4. Result of the telescope efficiency simulation
Fig. 5. Spectrograph module design
Fig. 6. Fiber bundle design
Fig. 7. Result of the indoor test
Fig. 8. Field test setup
Fig. 9. Result of the field test
Fig. 10. Comparison of Raman spectrum according to test conditions (a) MES, (b) PTFE
Table 1. Specifications of KrF excimer laser
Table 2. System requirements
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