Journal of Surface Science and Engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
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High Durable Anti-Reflective Polymer with Silica Nanoparticle Array Fabricated by RF Magnetron Sputter

RF sputter를 이용한 실리카 증착 고 내구성 반사 방지막 제조

  • Jeon, Seong-Gwon (Advanced Functional Thin Films Dept., Surface Technology Division, Korea of Materials Science) ;
  • Jeong, Eun-Uk (Advanced Functional Thin Films Dept., Surface Technology Division, Korea of Materials Science) ;
  • Rha, Jong-Joo (Advanced Functional Thin Films Dept., Surface Technology Division, Korea of Materials Science) ;
  • Kwon, Jung-Dae (Advanced Functional Thin Films Dept., Surface Technology Division, Korea of Materials Science)
  • 전성권 (한국기계연구원 부설 재료연구소) ;
  • 정은욱 (한국기계연구원 부설 재료연구소) ;
  • 나종주 (한국기계연구원 부설 재료연구소) ;
  • 권정대 (한국기계연구원 부설 재료연구소)
  • Received : 2018.09.07
  • Accepted : 2019.04.01
  • Published : 2019.04.30
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Abstract

We fabricated durable anti-reflective(AR) layer with silica globular coating on polymer by two steps. Firstly, nano-protrusions of polymer were formed by plasma etching known as R.I.E(reactive ion etching) process. Secondly, silica globular coating was deposited on polymer nano-protrusions for mechanically protective and optically enhancing AR layers by RF magnetron sputter. And then durable antireflective polymers were synthesized adjusting plasma power and time, working pressures of RIE and RF sputtering processes. Consequently, we acquired the average transmission (94.10%) in the visible spectral range 400-800 nm and the durability of AR layer was verified to sustain its transmission until 5,000 numbers by rubber test at a load of 500 gf.

Keywords

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Fig. 2. Transmittance comparison of rubber test results.

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Fig. 3. Digital images of different conditions (1),(2),(3) after rubber

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Fig. 4. schematic of the Anti-reflective structure formed on PET surface and FE-SEM images of cross section at different conditions (a) 40 W 25 min (b) 70 W 10 min (c) 140 W 2 min.

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Fig. 1. (a) Transmittance of visible average (400-800nm) according to plasma power 40 W, 70 W, 140 W respectively. (b) Optimized transmittance average (400-800nm) raw data changed plasma power 40 W, 70 W, 140 W respectively.

Table 1. Properties of Toray Film

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Table 2. Experimental conditions

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Table 3. Results of rubber test

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