Fig. 1. Block diagram of RF plasma system.
Fig. 7. Equivalent circuit of Dnn off and Dpn on during switch turn off – Mode 2. (left : conventional circuit, right : proposed circuit)
Fig. 8. Equivalent circuit of Dnn off and Dpn off during switch turn off – Mode 3. (left : conventional circuit, right : proposed circuit)
Fig. 11. Steady state analysis of EVC circuit using asymmetrical switch structure.
Fig. 14. Vspn of EVC circuit using asymmetrical switch structure in simulation result [50V/div] [2us/div].
Fig. 15. Vspn of EVC circuit using symmetrical switch structure in simulation result [50V/div] [2us/div].
Fig. 18. Vspn of EVC circuit using asymmetrical switch structure in experiment result. (300W)
Fig. 2. RF plasma circuit with EVC using multi leg asymmetrical switch structure.
Fig. 3. Ideal case and real case of EVC circuit. (left : ideal case, right : real case)
Fig. 4. RF plasma circuit with EVC using one leg asymmetrical switch structure.
Fig. 5. Two types of EVC circuit. (left : conventional circuit, right : proposed circuit)
Fig. 6. Equivalent circuit of switch turn on – Mode 1. (left : conventional circuit, right : proposed circuit)
Fig. 9. Equivalent circuit of Dnn on and Dpn off during switch turn off – Mode 4. (left : conventional circuit, right : proposed circuit)
Fig. 10. Transient analysis of EVC circuit using asymmetrical switch structure.
Fig. 12. Transient analysis of EVC circuit using symmetrical switch structure.
Fig. 13. Steady state analysis of EVC circuit using symmetrical switch structure.
Fig. 16. Circuit configuration.
Fig. 17. Hardware configuration.
Fig. 19. Vspn and Vsnn of EVC circuit using symmetrical switch structure in experiment result. (300W)
Fig. 20. Vspn of EVC circuit using asymmetrical switch structure in experiment result. (500W)
Fig. 21. Vspn and Vsnn of EVC circuit using symmetrical switch structure in experiment result. (500W)
TABLE I CIRCUIT PARAMETERS OF SIMULATION
참고문헌
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