Quantitative Analysis of the Impact of Inlet Duct Spray on Scrubbing Efficiency using Experimental Design

실험계획법을 이용한 입구덕트 스프레이의 습식 세정 효율 변화효과 분석 연구

Abstract

The purpose of this study is to develop a packing-free wet scrubber to prolong the maintenance interval compared with the conventional packed bed wet scrubbers with which frequent operation stops are unavoidable to clean the packing materials. The main- and interaction-effects were quantitatively analyzed by regression analysis for the measured ammonia scrubbing data from the experiments prepared by experimental design. The scrubbing efficiency of the newly developed wet scrubber was found to be over 95% under the condition of flue gas flow rate of 90CMM and liquid-to-gas ratio $2l/m^3$ for all considered trials of experimental design. The interaction effect between the inlet duct spray and the filter was found to be important, which controls the droplet growth due to the droplet collisions between the duct- and scrubbing tower-spray. The presented methodology to analyze the impacts of operational and design factors on the scrubber efficiency showed potential for applications to optimize the future flue gas abatement process in semiconductor plants.

Fig. 1 Schematics of the experimental setup

Fig. 2 Raw data, averages and confidence interval of 95% confidence level for test cases; the numbers in legend represent the repetition sequence.

Fig. 3 Comparison of raw data and regression model predictions together with 95% confidence interval of the regression model

Fig. 4 Impacts of each design parameter on NH₄ removal efficiency

Table 1 Levels of parameters in the tests

Table 2 Test conditions for full factorial design

Table 3 Summary of test results

Table 5 Results of linear regression analysis of duct spray and mesh filter effects on pressure drop in the wet scrubber

Table 4 Results of linear regression analysis of duct spray and mesh filter application effects on NH₄ removal efficiency