Journal of the Korean Society of Manufacturing Process Engineers (한국기계가공학회지)

The Korean Society of Manufacturing Process Engineers (한국기계가공학회)
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Ultra-Precision Machining of Off-Axis Asymmetric Large-area Reflecting Mirror Using ELID Grinding Process

ELID 연삭을 이용한 비축 비구면 렌즈의 초정밀 가공

  • Jung, Myung-Won (Dept. of Mechanical Engineering, Gyeongnam National University of Sci. and Tech.) ;
  • Shin, Gun-hwi (Dept. of Mechanical Engineering, Gyeongnam National University of Sci. and Tech.) ;
  • Kim, Geon-Hee (Center for Analytical Instrumentation Development, Korea Basic Science Institute) ;
  • Ohmori, Hitoshi (OHMORI Materials Fabrication Laboratory, RIKEN) ;
  • Kwak, Tae-Soo (Dept. of Mechanical Engineering, Gyeongnam National University of Sci. and Tech.)
  • 정명원 (경남과학기술대학교 기계공학과) ;
  • 신건휘 (경남과학기술대학교 기계공학과) ;
  • 김건희 (한국기초과학지원연구원 연구장비개발본부) ;
  • 오오모리 히토시 (이화학연구소 오오모리소형재공학연구실) ;
  • 곽태수 (경남과학기술대학교 기계공학과)
  • Received : 2018.10.08
  • Accepted : 2018.11.25
  • Published : 2019.01.31
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Abstract

This study focused on the application of ELID mirror-surface grinding technology to the manufacture of off-axis asymmetric large-area reflecting mirrors made of BK7 glass. The size of the parts, such as asymmetric large-area mirrors or lens, made form-accuracy or roughness especially hard to measure after machining because of the measuring range limit of measurement devices. In this study, the ELID grinding system has been set up for mirror-surface machining experiments manufacturing off-axis asymmetric lenses. A measuring method using a reference workpiece has been suggested to measure the form-accuracy and roughness. According to the experimental results, even when using only a reference workpiece, it is confirmed that the surface roughness was 8 nmRa and form-accuracy was 80 nmRMS, with a best fit asymmetric radius when using a grinding wheel of #8,000. It is found that the accuracy of large-area parts could be estimated by the proposed process.

Keywords

References

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