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Variation in IR Absorption Characteristics of a Bolometer by Resistive Hole-array Patterns

저항성 홀배열이 적용된 볼로미터의 적외선 흡수 특성 변화

  • Kim, Tae Hyun (Department of Nanostructure Technology, National Nanofab Center) ;
  • Oh, Jaesub (Department of Nanostructure Technology, National Nanofab Center) ;
  • Park, Jongcheol (Department of Nanostructure Technology, National Nanofab Center) ;
  • Kim, Hee Yeoun (Department of Nanostructure Technology, National Nanofab Center) ;
  • Lee, Jong-Kwon (Department of Nanostructure Technology, National Nanofab Center)
  • 김태현 (나노종합기술원 나노구조기술개발부) ;
  • 오재섭 (나노종합기술원 나노구조기술개발부) ;
  • 박종철 (나노종합기술원 나노구조기술개발부) ;
  • 김희연 (나노종합기술원 나노구조기술개발부) ;
  • 이종권 (나노종합기술원 나노구조기술개발부)
  • Received : 2018.08.27
  • Accepted : 2018.09.13
  • Published : 2018.09.30

Abstract

In order to develop a highly sensitive infrared sensor, it is necessary to develop techniques for decreasing the rate of heat absorption and the transition of the absorption wavelength to a longer wavelength, both of which can be induced by decreasing the pixel size of the bolometer. Therefore, in this study, $1{\mu}m$ hole-arrays with a subwavelength smaller than the incident infrared wavelength were formed on the amorphous silicon-based microbolometer pixels in the absorber, which consisted of a TiN absorption layer, an a-Si resistance layer and a SiNx membrane support layer. We demonstrated that it is possible to reduce the thermal time constant by 16% relative to the hole-patternless bolometer, and that it is possible to shift the absorption peak to a shorter wavelength as well as increase absorption in the $4-8{\mu}m$ band to compensate for the infrared long-wavelength transition. These results demonstrate the potential for a new approach to improve the performance of high-resolution microbolometers.

Keywords

References

  1. A. Rogalski, P. Martyniuk, and M. Kopytko, "Challenges of small-pixel infrared detectors: a review," Rep. Prog. Phys. Vol. 79, p. 046501, 2016. https://doi.org/10.1088/0034-4885/79/4/046501
  2. A. Rogalski, "Infrared detectors: status and trends," Prog. Quant. Electron. Vol. 27, p. 59, 2003. https://doi.org/10.1016/S0079-6727(02)00024-1
  3. M. Kim, S. Park, K. Lee, and H.-J. Yoo, "Uncooled Infrared Micro-Bolometer FPA for Multiple Digital Correlated Double Sampling," IEEE Photonic Tech. Lett. Vol. 30, p. 517, 2018. https://doi.org/10.1109/LPT.2018.2792491
  4. J. J. Yon, E. Mottin, L. Biancardini, L. Letellier, and J. L. Tissot, "Infrared microbolometer sensors and their application in automotive safety," Adv. Microsystem for Automotive Appl., p. 137, 2003.
  5. J-.Y. Jung, K. Song, J.-H. Choi, J. Lee, D.-G. Choi, J.-H. Jeong, and D. P. Neikirk, "Infrared broadband metasurface absorber for reducing the thermal mass of a microbolometer," Sci. Rep. Vol. 7, p. 430, 2017. https://doi.org/10.1038/s41598-017-00586-x
  6. J. Kim, K. Han, and J. W. Hahn, "Selective dual-band meta-material perfect absorber for infrared stealth technology," Sci. Rep. Vol. 7, p. 6740, 2017. https://doi.org/10.1038/s41598-017-06749-0
  7. T. Maier and H. Bruckl, "Wavelength-tunable microbolometers with metamaterial absorbers," Opt. Lett. Vol. 34, p. 3012, 2009. https://doi.org/10.1364/OL.34.003012
  8. A. Tittl, A.-K. U. Michel, M. Schaferling, X. Yin, B. Gholipour, L. Cui, M. Wuttig, T. Taubner, F. Neubrech, and H. Giessen, "A Switchable Mid-Infrared Plasmonic Perfect Absorber with Multispectral Thermal Imaging Capability," Adv. Mater. Vol. 27, p. 4597, 2015. https://doi.org/10.1002/adma.201502023
  9. J. Grant, M. Kenney, Y. D. Shah, I. Escrcia-Carranza, and D. R. S. Cumming, "CMOS compatible metamaterial absorbers for hyperspectral medium wave infrared imaging and sensing applications," Opt. Express Vol. 26, p. 10408, 2018. https://doi.org/10.1364/OE.26.010408