Journal of Radiation Protection and Research

  • 제43권4호
  • /
  • Pages.131-136
  • /
  • 2018
  • /
  • 2508-1888(pISSN)
  • /
  • 2466-2461(eISSN)
대한방사선방어학회 (The Korean Association for Radiation Protection)
권호 표지
DOI QR코드

DOI QR Code

Influence of the Thin-Film Ag Electrode Deposition Thickness on the Current Characteristics of a CVD Diamond Radiation Detector

  • Ban, Chae-Min (Neutron Utilization Research Division, Korea Atomic Energy Research Institute) ;
  • Lee, Chul-Yong (Neutron Utilization Research Division, Korea Atomic Energy Research Institute) ;
  • Jun, Byung-Hyuk (Neutron Utilization Research Division, Korea Atomic Energy Research Institute)
  • 투고 : 2018.06.28
  • 심사 : 2018.11.17
  • 발행 : 2018.12.31
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

Background: We investigated the current characteristics of a thin-film Ag electrode on a chemical vapor deposition (CVD) diamond. The CVD diamond is widely recognized as a radiation detection material because of its high tolerance against high radiation, stable response to various dose rates, and good sensitivity. Additionally, thin-film Ag has been widely used as an electrode with high electrical conductivity. Materials and Methods: Considering these properties, the thin-film Ag electrode was deposited onto CVD diamonds with varied deposition thicknesses (${\fallingdotseq}50/98/152/257nm$); subsequently, the surface thickness, surface roughness, leakage current, and photo-current were characterized. Results and Discussion: The leakage current was found to be very low, and the photo-current output signal was observed as stable for a deposited film thickness of 98 nm; at this thickness, a uniform and constant surface roughness of the deposited thin-film Ag electrode were obtained. Conclusion: We found that a CVD diamond radiation detector with a thin-film Ag electrode deposition thickness close to 100 nm exhibited minimal leakage current and yielded a highly stable output signal.

키워드

참고문헌

  1. Konorova EA, Kozlov SF, Vavilov VS. Ionization currents in diamonds during irradiation with 500 to 1,000-kev electrons. Soviet Phys.-Solid State. 1966;8:1-5.
  2. Almaviva S, et al. Thermal and fast neutron detection in chemical vapor deposition single-crystal diamond detectors. J. Appl. Phys. 2008;103:054501 1-6. https://doi.org/10.1063/1.2838208
  3. Weilhammer P, et al. Recent results on CVD diamond radiation sensors. Nucl. Instrum. Methods Phys. Res., Sect. A. 1998;409(1-3):264-270. https://doi.org/10.1016/S0168-9002(97)01277-1
  4. Almaviva S, Marinelli M, Milani E, Prestopino G, Tucciarone A, Verona C, Verona-Rinati G, Angelone M, Pillon M. Extreme UV photodetectors based on CVD single crystal diamond in a p-type/intrinsic/metal configuration. Diamond Relat. Mater. 2009;18(1):101-105. https://doi.org/10.1016/j.diamond.2008.10.034
  5. Barberini L, Cadeddu S, Caria M, Murgia F. Tests on far UV irradiation of CVD diamond. Nucl. Ins. and Meth. in Phys. Research A. 2000;442(1-3):400-403.
  6. Minglong Z, Yiben X, Linjun W, Hujiang S. Response of chemical vapor deposition diamond detectors to X-ray. Solid State Commun. 2004;130(6):425-428. https://doi.org/10.1016/j.ssc.2004.01.013
  7. Bergonzo P, Tromson D, Mer C. Radiation detection devices made from CVD diamond. Semicond. Sci. Technol. 2003;18(3):S105-S112. https://doi.org/10.1088/0268-1242/18/3/315
  8. McKeag RD, Jackman RB. Diamond UV photodetectors: sensitivity and speed for visible blind applications. Diamond Relat. Mater. 1998;7(2-5):513-518. https://doi.org/10.1016/S0925-9635(97)00274-4
  9. Marco Marinelli, et al. Synthetic single crystal diamond as a fission reactor neutron flux monitor. Appl. Phys. Lett. 2007;90:183509. https://doi.org/10.1063/1.2734921
  10. Venkatesan V, Malta DM, Das K, Belu AM. Evaluation of ohmic contacts formed by B+ implantation and Ti-Au metallization on diamond. J. Appl. Phys. 1993;74:1179. https://doi.org/10.1063/1.354918
  11. Galbiati A, et al. Performance of monocrystalline diamond radiation detectors fabricated using TiW, Cr/Au and a novel ohmic DLC/Pt/Au electrical contact. IEEE Trans. Nucl. Sci. 2009;56(4):1863-1874. https://doi.org/10.1109/TNS.2009.2020428
  12. Hauder M, Gstottner J, Hansch W, Schmitt-Landsiedel D. Scaling properties and electromigration resistance of sputtered Ag metallization lines. Appl. Phys. Lett. 2001;78:838. https://doi.org/10.1063/1.1345801
  13. Gao L, Harter P, Linsmeier C, Wiltner A, Emling R, Schmitt-Landsiedel D. Silver metal organic chemical vapor deposition for advanced silver metallization. Microelectron. Eng. 2005;82(3-4):296-300. https://doi.org/10.1016/j.mee.2005.07.078
  14. Abdel-Rahman M, Lohstroh A, Sellin PJ. The effect of annealing on the X-ray induced photocurrent characteristics of CVD diamond radiation detectors with different electrical contacts. Phys. Status Solidi A. 2011;208(9):2079-2086. https://doi.org/10.1002/pssa.201100011
  15. Iwakaji Y, Kanasugi M, Maida O, Ito T. Characterization of diamond ultraviolet detectors fabricated with high-quality singlecrystalline chemical vapor deposition films. Appl. Phys. Lett. 2009;94:223511. https://doi.org/10.1063/1.3143621
  16. Ciancaglioni I, Marinelli M, Milani E, Prestopino G, Verona C, Verona-Rinati G, Angelone M, Pillon M. Secondary electron emission in extreme-UV detectors: Application to diamond based devices. J. Appl. Phys. 2011;110:014501. https://doi.org/10.1063/1.3602125
  17. Pace E, De Sio A. Diamond detectors for space applications. Nucl. Instrum. Methods Phys. Res., Sect. A. 2003;514(1-3):93-99. https://doi.org/10.1016/j.nima.2003.08.088
  18. Periale L, Bizzaro S, Gervino G, Lamarina AM, Palmisano C, Periale R, Picchi P. CVD diamond sensor for UV-photon detection. Nucl. Instrum. Methods Phys. Res., Sect. A. 2012;695:276-278. https://doi.org/10.1016/j.nima.2011.10.047