Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Study of Manual Spray Coating Method for Fabricating Flexible Cantilever

유연성 높은 캔틸레버 제작을 위한 스프레이 코팅 방법 연구

  • Kim, Ji-Kwan (School of Mechanical and Metallic Mold Engineering, Gwangju University)
  • 김지관 (광주대학교 기계.금형공학부)
  • Received : 2017.09.14
  • Accepted : 2017.09.21
  • Published : 2017.09.30
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Abstract

This work presents a detailed study of several parameters on the spray coating method for fabricating a flexible cantilever. Conventionally, spin coating method have been widely used in the microelectromechanical system (MEMS) fabrication process. However, the major drawback of this method is the difficulties in protecting various topography with photoresist film, particularly when the device is manufactured in high aspect ratio. It is also a challenging process to form a small pattern in the etched area. On the other hand, the commercial spray coating systems are not advantageous from an economic perspective and the technique is also providing less efficient. In order to solve these issues, we have developed a manual spray coating system which can be efficiently used by combining the accessories available in the laboratory. The developed spray coating system consists of a spin-coater, motorized stage, a spray gun with the capable of controlling centrifugal force, injection amount, injection angle, and spray range. The major advantage of the proposed spray coating system is its reasonable fabrication cost. Secondly, the system can be easily disassembled after finishing the coating experiment. Owing to the mentioned advantages, we sincerely believe that the proposed spray coating system can be effectively used in many related applications.

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References

  1. Duk-Soo EUN, Do-Wok KIM, Chang-Taeg SEO, Jong-Hyun LEE, Young-Ho BAE, In-Sik Yu, and Chang-Gil SUK, "Photoresist Spray Coating for Resist Film Performance of Deep Silicon Cavities", J. Korean Physical Society, Vol. 50, No. 6, pp. 1947-1951, 2007. https://doi.org/10.3938/jkps.50.1947
  2. Nithi Atthi, Karoon Saejok, Jakrapong Supadech, Wutthinan Jeamsaksiri, Oraphan Thongsuk, Paweena Dulyaseree, Charndet Hruanun, and Amporn Poyai, "Improvement of Photoresist Film Coverage on High Topology Surface with Spray Coating Technique", J. Microscopy Society of Thailand, Vol. 24, No. 1, pp. 42-46, 2010.
  3. T. Luxbacher and A. Mirza, "Spray Coating for MEMS, Interconnects, and Advanced Packaging Applications", Sensors, Vol. 16, No. 7, pp. 61-64, 1999.
  4. N. Pham, T. Scholtes, R. Klerks, E. Boellaard, P.M. Sarro, and J.N. Burghartz, "Direct spray coating of photoresist - a new method for patterning 3-D structures", Eurosensors XVI, pp. 182-185, Prague, Czech Republic, 2002.
  5. Liming Yu, Yong Yeow Lee, Francis E.H. Tay, and Ciprian Iliescu, "Spray Coating of Photoresist for 3D Microstructures with Different Geometries", J. Physics: Conference Series, Vol. 34, pp. 937-942, 2006. https://doi.org/10.1088/1742-6596/34/1/155
  6. Zhe Wang, Hongyang Ma, Benjamin Chu, and Benjamin S. Hsiao, "Fabrication of cellulose nanofiber-based ultrafiltration membranes by spray coating approach", J. Appl. Polym. Sci., Vol. 134, pp. 44583, 2017.
  7. U. Staudinger, P. Thoma, F. Luttich, A. Janke, O. Kobsch, O.D. Gordan, P. Potschke, B. Voit, and D.R.T Zahn, "Properties of thin layers of electrically conductive polymer/MWCNT composites prepared by spray coating", Composites Science and Technology, Vol. 138, pp. 134-143, 2017. https://doi.org/10.1016/j.compscitech.2016.11.015
  8. Jin Xiao, Lei Chen, Hongchun Yuan, Lei Ji, Chao Xiong, Jinxiang Ma, and Xifang Zhu, "Fabrication and characterization of $BaZr_{0.1}Ce_{0.7}Y_{0.2}O_{3-{\delta}}$ based anode supported solid oxide fuel cells by tape casting combined with spray coating", Materials Letters, Vol. 189, pp. 192-195, 2017. https://doi.org/10.1016/j.matlet.2016.10.114
  9. Jiseop Hwang, Ho-Jung Ha, Jungho Ryu, Jong-Jin Choi, Cheol-Woo Ahn, Jong-Woo Kim, Byung-Dong Hahn, Woon-Ha Yoon, Heesoo Lee, and Joon-Hwan Choi, "Enancement of washcoat adhesion for SCR catalysts to convert nitrogen oxide using powder spray coating of $TiO_2$ on metallic honeycomb substrate", Catalysis Communications, Vol. 94, pp. 1-4, 2017. https://doi.org/10.1016/j.catcom.2017.02.002
  10. Mohammad Nur E Alam Al Nasim, and Doo-Man Chun, "Formation of few-layer graphene flake structures from graphite particles during thin film coating using dry spray deposition method", Thin Solid Films, Vol. 622, pp. 34-40, 2017. https://doi.org/10.1016/j.tsf.2016.12.012