한국대기환경학회지 (Journal of Korean Society for Atmospheric Environment)

  • 제33권4호
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  • Pages.326-332
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  • 2017
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  • 1598-7132(pISSN)
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  • 2383-5346(eISSN)
한국대기환경학회 (Korean Society for Atmospheric Environment)
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SF6의 플라즈마 분해로부터 생성된 입자상 물질에 관한 연구

A Study on Particulate Matter Formed from Plasma Decomposition of SF6

  • 김선우 (경남대학교 도시환경공학과) ;
  • 김종범 (경남대학교 도시환경공학과) ;
  • 김재환 (경남대학교 도시환경공학과) ;
  • 김래형 (경남대학교 도시환경공학과) ;
  • 류재용 (경남대학교 도시환경공학과)
  • Kim, Seon-Woo (Department of Urban Environmental Engineering, Kyungnam University) ;
  • Kim, Jong-Bum (Department of Urban Environmental Engineering, Kyungnam University) ;
  • Kim, Jae-Hwan (Department of Urban Environmental Engineering, Kyungnam University) ;
  • Kim, Rae-Hyeong (Department of Urban Environmental Engineering, Kyungnam University) ;
  • Ryu, Jae-Yong (Department of Urban Environmental Engineering, Kyungnam University)
  • 투고 : 2017.07.10
  • 심사 : 2017.08.17
  • 발행 : 2017.08.31
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초록

$SF_6$ (sulfur hexafluoride) gas has an extremely high global warming potential (GWP). Therefore, there has been an effort to reduce of $SF_6$ its emission into atmosphere. In this study, $SF_6$ was injected into the plasma reactor directly, decomposed particulate matter of $SF_6$ was analyzed. Destruction and removal efficiency (DRE) of $SF_6$ were tested with varying degrees of plasma power and initial concentrations of $SF_6$ (1,000 ppm). This study is conducted with plasma power which are 4.4 kW, 5.5 kW, 6.0 kW, 6.6 kW, 7.6 kW, 8.1 kW and 9.1 kW. It was confirmed through experiment that the decomposition efficiency of $SF_6$ is 100% at 7.6 kW of the plasma power. In addition, the particulate matter is formed as minute particles of which size is $1{\mu}m$ and the main component of particulate matter is identified as $AlF_3$.

키워드

참고문헌

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피인용 문헌

  1. A Study on Decomposition of Perfluorocompounds (NF3, CF4, SF6) Emitted from Semiconductor Process using Plasma vol.35, pp.3, 2018, https://doi.org/10.9786/kswm.2018.35.3.250