한국입자에어로졸학회지 (Particle and aerosol research)

  • 제13권2호
  • /
  • Pages.65-77
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  • 2017
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  • 1738-8716(pISSN)
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  • 2287-8130(eISSN)
한국입자에어로졸학회 (Korean Association for Particle and Aerosol Research)
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반도체 클린룸용 외기공조시스템의 수분무 가습을 이용한 에너지절감에 관한 연구

A Study on Energy Reduction in an Outdoor Air Conditioning System for Semiconductor Manufacturing Cleanrooms Using Water Spray Humidification

  • 송원일 (한국생산기술연구원 나노오염제어연구실) ;
  • 김기철 (한국생산기술연구원 나노오염제어연구실) ;
  • 유경훈 (한국생산기술연구원 나노오염제어연구실) ;
  • 신대건 ((주)대한피엔씨) ;
  • 태경응 (은성화학(주)) ;
  • 김용식 (삼우시스템(주)) ;
  • 박덕준 ((주)신성이엔지)
  • 투고 : 2017.03.28
  • 심사 : 2017.05.02
  • 발행 : 2017.06.30
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초록

In recent large-scale semiconductor manufacturing cleanrooms, the energy consumption in outdoor air conditioning (OAC) systems to heat, humidify, cool and dehumidify outdoor air(OA) represents about 40~50 % of the total cleanroom power consumption required to maintain cleanroom environment. Therefore, the assessment of energy consumption in outdoor air conditioning systems is essential for reducing the outdoor air conditioning load for a cleanroom. In the present study, an experiment with an outdoor air flow rate of $1,000m^3/h$ was conducted to compare the energy consumption in steam humidification, simple air washer, exhaust air heat recovery type air washer and dry cooling coil(DCC) return water heat recovery type air washer OAC systems. Besides, a numerical analysis was carried out to evaluate the annual energy consumption of the aforementioned four OAC systems. It was shown that the simple air washer, exhaust air heat recovery type air washer and DCC return water heat recovery type air washer OAC systems using water spray humidification were more energy-efficient than the steam humidification OAC system. Furthermore the DCC return water heat recovery type air washer OAC system was the most energy-efficient.

키워드

참고문헌

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