Transactions of the Korean Society of Mechanical Engineers A (대한기계학회논문집A)

The Korean Society of Mechanical Engineers (대한기계학회)
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Ultrasonic Characterization of a Resonating High-Speed Microcantilever

초음파 기법을 이용한 고속 마이크로 캔틸레버의 공진 특성평가

  • Kim, Yun Young (Division of Mechanical, Automotive, and Robot Component Engineering, Dong-eui Univ.) ;
  • Lee, Seonwook (School of Mechanical Engineering, Pusan Nat'l Univ.) ;
  • Park, Jiwon (School of Mechanical Engineering, Pusan Nat'l Univ.) ;
  • Cho, Younho (School of Mechanical Engineering, Pusan Nat'l Univ.)
  • 김윤영 (동의대학교 기계자동차로봇부품공학부) ;
  • 이선욱 (부산대학교 기계공학부) ;
  • 박지원 (부산대학교 기계공학부) ;
  • 조윤호 (부산대학교 기계공학부)
  • Received : 2016.09.26
  • Accepted : 2017.02.27
  • Published : 2017.06.01
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Abstract

An ultrasonic technique was developed to characterize the resonance behavior of a microcantilever operating in a megahertz regime. A high-power ultrasonic pulser and a contact transducer were employed to excite the silicon microcantilever, and a Michelson interferometer was used to obtain the time domain waveform. The natural frequency of the microcantilever was evaluated through the fast Fourier transform of the signal, and a numerical analysis using the finite element method confirmed the measurement data. The present study proposes a novel and facile method to evaluate nanoscale materials and structures with high sensitivity compared to conventional approaches.

본 연구에서는 초음파 기법을 이용하여 메가헤르츠 대역에서 작동하는 마이크로 캔틸레버의 공진 주파수를 측정하였다. 고출력 초음파 펄스 발생기와 탐촉자를 이용하여 실리콘 재질의 마이크로 캔틸레버를 가진하였으며, 532 nm 연속파장(continuous wave) 레이저를 광원으로 하는 마이켈슨 간섭계를 사용하여 자유진동하는 마이크로 캔틸레버의 시간영역 파형을 획득하였다. 고속 푸리에 변환(fast Fourier transform)을 통한 주파수 응답 특성으로부터 마이크로 캔틸레버의 고유진동수를 평가할 수 있었으며, 유한요소법을 이용한 수치해석을 통하여 그 타당성을 검증하였다. 본 연구는 기존 원자현미경 기반의 측정기술과 대비하여 민감도를 향상시킬 수 있는 특성평가 기법을 제시한다.

Keywords

References

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