JSTS:Journal of Semiconductor Technology and Science

The Institute of Electronics and Information Engineers (대한전자공학회)
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Methodology for Extracting Trap Depth using Statistical RTS Noise Data of Capture and Emission Time Constant

  • Oh, Dong-Jun (Division of Electronics, Radio Science & Engineering, and Information Communications Engineering, Chungnam National University) ;
  • Kwon, Sung-Kyu (Division of Electronics, Radio Science & Engineering, and Information Communications Engineering, Chungnam National University) ;
  • Song, Hyeong-Sub (Division of Electronics, Radio Science & Engineering, and Information Communications Engineering, Chungnam National University) ;
  • Kim, So-Yeong (Division of Electronics, Radio Science & Engineering, and Information Communications Engineering, Chungnam National University) ;
  • Lee, Ga-Won (Department of Electronics Engineering, Chungnam National University) ;
  • Lee, Hi-Deok (Department of Electronics Engineering, Chungnam National University)
  • Received : 2016.08.25
  • Accepted : 2016.12.27
  • Published : 2017.04.30
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Abstract

In this paper, we propose a novel method for extracting an accurate depth of a trap that causes RTS(Random Telegraph Signal) noise. The error rates of the trap depth rely on the mean time constants and its ratio. Here, we determined how many data of the capture and emission time constant are necessary in order to reduce the trap depth error caused by an inaccurate mean time constant. We measured the capture and emission time constants up to 100,000 times in order to ensure that the samples had statistical meaning. As a result, we demonstrated that at least 1,000 samples are necessary to satisfy less than 10% error for trap depth. This result could be used to improve the accuracy of RTS noise analysis.

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References

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