센서학회지 (Journal of Sensor Science and Technology)

  • 제26권2호
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  • Pages.91-95
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  • 2017
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  • 1225-5475(pISSN)
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  • 2093-7563(eISSN)
한국센서학회 (The Korean Sensors Society)
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Silicon Prism-based NIR Spectrometer Utilizing MEMS Technology

  • Jung, Dong Geon (School of Electronics Engineering, Kyungpook National University) ;
  • Son, Su Hee (School of Electronics Engineering, Kyungpook National University) ;
  • Kwon, Sun Young (School of Electronics Engineering, Kyungpook National University) ;
  • Lee, Jun Yeop (School of Electronics Engineering, Kyungpook National University) ;
  • Kong, Seong Ho (School of Electronics Engineering, Kyungpook National University)
  • 투고 : 2017.01.19
  • 심사 : 2017.03.27
  • 발행 : 2017.03.31
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초록

Recently, infrared (IR) spectrometers have been required in various fields such as environment, safety, mobile, automotive, and military. This IR dispersive sensor detection method of substances is widely used. In this study, we fabricated a silicon (Si) prism-based near infrared (NIR) spectrometer utilizing micro electro mechanical system (MEMS) technology. Si prism-based NIR spectrometer utilizing MEMS technology consists of upper, middle, and lower substrates. The upper substrate passes through the incident IR ray selectively. The middle substrate, acting as a prism, disperses and separates the incident IR beam. The lower substrate has an amorphous Si (a-Si)-based bolometer array to detect the IR spectrum. The fabricated Si prism-based NIR spectrometer utilizing MEMS technology has the advantage of a simple structure, easy fabrication steps, and a wide NIR region operating range.

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참고문헌

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