금속 윈도우 유도 결합 플라즈마 방전 장치에 대한 수치 해석적 접근

References

1. J. P. Verboncoeur, Plasma Phys. Contr. Fusion, 47, A232 (2005).
2. J. Brcka, Jpn. J. Appl. Phys. , 55, 07LD08 (2016). https://doi.org/10.7567/JJAP.55.07LD08
3. P. L. G. Ventzek, R. J. Hoekstra, and M. J. Kushner, J. Vac. Sci. Technol. B 12, 461 (1994). https://doi.org/10.1116/1.587101
4. H. Choe, N. Yoon, S. Kim and D. Choi, J. Comp. Phys. 170, 550 (2001). https://doi.org/10.1006/jcph.2001.6748
5. P. Crispel, P. Degond, and M. Vignal, J. Comp. Phys. 223, 208 (2007). https://doi.org/10.1016/j.jcp.2006.09.004
6. M. Becker, H. Kahlert, A Sun, M Bonitz and D. Loffhagen, Plasma Sources Sci. and Technol. 26, 044001 (2017). https://doi.org/10.1088/1361-6595/aa5cce