Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
권호 표지
DOI QR코드

DOI QR Code

Low Noise and Low Power IC Using Opamp Sharing Technique for Capacitive Micro-Sensor Sensing Platform

증폭기 공유 기법을 이용한 저전력 저잡음 용량형 센서용 신호 처리 IC

  • Park, Yunjong (Department of Electronics Engineering, Chungnam National University) ;
  • Kim, Choul-Young (Department of Electronics Engineering, Chungnam National University) ;
  • Jung, Bang Chul (Department of Electronics Engineering, Chungnam National University) ;
  • Yoo, Hoyoung (Department of Electronics Engineering, Chungnam National University) ;
  • Ko, Hyoungho (Department of Electronics Engineering, Chungnam National University)
  • Received : 2016.12.13
  • Accepted : 2017.01.27
  • Published : 2017.01.31
Download PDF
⟨ Previous Next ⟩

Abstract

This paper describes the low noise and low power IC using the opamp sharing technique for the capacitive micro-sensor sensing platform. The proposed IC reduces noise using correlated double sampling (CDS) and reduces power consumption using the opamp sharing technique. The IC is designed to be fully programmable, and can be digitally controlled by serial peripheral interface (SPI). The power consumption and the integrated input referred noise are 1.02 mW from a 3.3 V supply voltage and $0.164aF_{RMS}$ with a bandwidth of 400 Hz. The capacitive sensitivity, the input-output linearity and the figure of merits (FoM) are 2.5 mV/fF, 2.46 %FSO, and 8.4, respectively.

Keywords

References

  1. J. Shiah, S. Mirabbasi, "A 5-V 290-${\mu}W$ low-noise chopperstabilized capacitive-sensor readout circuit in 0.8-${\mu}m$ CMOS using a correlated level-shifting technique," IEEE Trans. Circuits Syst. II, Express Briefs, Vol. 61, No. 4, pp. 254-258, April, 2014. https://doi.org/10.1109/TCSII.2014.2304888
  2. J. Wu, G. K. Fedder, L. R. Carley, "A low-noise low-offset capacitive sensing amplifier for a 50-${\mu}g/{\vee}Hz$ monolithic CMOS MEMS accelerometer," IEEE J. Solid-State Circuits, Vol. 39, No. 5, pp. 722-730, May, 2004. https://doi.org/10.1109/JSSC.2004.826329
  3. J. Shiah, S. Mirabbasi, "A 5-V 555-${\mu}W$ 0.8-${mu}m$ CMOS MEMS capacitive sensor interface using correlated level shifting," Proc. IEEE Int. Symp. Circuits Syst. (ISCAS), pp. 1504-1507, May, 2013.
  4. Z. Hu, H. Quan, F. Zhang, P. Wang, "Ultra-low noise charge sensitive amplifier for MEMS gyroscope," Proc. 5th Int. Conf. MEMS, NANO, Smart Syst. (ICMENS), pp. 29-32, December, 2009.
  5. M. Zhao, W. Lu, Z. Chen, T. Zhang, F. Wu, Y. Zhang, D. Liu, "A low-noise switched-capacitor interface for a capacitive micro-accelerometer," Proc. IEEE Int. Symp. Circuits Syst. (ISCAS), pp. 337-340, May, 2015.
  6. H. Song, Y. Park, H. Kim, D. Cho, H. Ko, "Fully integrated low-noise readout circuit with automatic offset cancellation loop for capacitive microsensors," Sensors, Vol. 15, No. 10, pp. 26009-26017, 2015. https://doi.org/10.3390/s151026009
  7. H. Ha, Y. Suh, S. K. Lee, H. J. Park, J. Y. Sim, "A 0.5 V, 11.3-${\mu}W$, 1-kS/s resistive sensor interface circuit with correlated double sampling." IEEE Custom Integrated Circuits Conference (CICC), pp.1-4, September, 2012.
  8. S. Guo, H. Lee, "Single-capacitor active-feedback compensation for small-capacitive-load three-stage amplifiers," IEEE Trans. Circuits Syst. II, Express Briefs, Vol. 56, No. 10, pp. 758-762, October, 2009. https://doi.org/10.1109/TCSII.2009.2027954
  9. G. Kim, C. Seok, T. Kim, J. H. Park, H. Kim, H. Ko, "The micro pirani gauge with low noise CDS-CTIA for in-situ vacuum monitoring," J. Semiconductor Technol. Sci., Vol. 14, No. 6, pp. 733-740, 2014. https://doi.org/10.5573/JSTS.2014.14.6.733
  10. M. Perenzoni, N. Massari, D. Stoppa, L. Pancheri, M. Malfatti, L. Gonzo, "A 160 120-pixels range camera with inpixel correlated double sampling and fixed-pattern noise correction," IEEE J. Solid-State Circuits, Vol. 46, No. 7, pp. 1672-1681, 2011. https://doi.org/10.1109/JSSC.2011.2144130
  11. X. Wen, J. Chen, Y. You, Y. Feng, Y. Tang, Z. Zuo, T. Liu, "A 12-bit 60-MS/s 36-mW SHA-less opamp-sharing pipeline ADC in 130 nm CMOS," J. Instrumentation, Vol. 11, January, 2016.
  12. D. R. da Silva, N. Oki, "An amplifier and capacitor sharing technique using recycling folded cascode operational amplifier with applications in MDAC of CMOS pipelined ADC," IEEE Design of Circuits and Integrated Systems (DCIS) 2015 Conference on, pp. 1-4, 2015.
  13. J. Wu, G. K. Fedder, L. R. Carley, "A low-noise low-offset capacitive sensing amplifier for a 50-/spl mu/g//spl radic/Hz monolithic CMOS MEMS accelerometer," IEEE J. Solid-State Circuits, Vol. 39, pp. 722-730, 2004. https://doi.org/10.1109/JSSC.2004.826329