Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Development and Performance Evaluation of Fine Stage for 3-DOF Error Compensation of a Linear Axis

직선 이송축의 3자유도 오차 보정을 위한 미세 구동 스테이지 개발 및 성능 평가

  • Lee, Jae Chang (School of Mechanical Engineering, Kyungpook National University) ;
  • Lee, Min Jae (School of Mechanical Engineering, Kyungpook National University) ;
  • Yang, Seung Han (School of Mechanical Engineering, Kyungpook National University)
  • Received : 2016.01.19
  • Accepted : 2016.10.10
  • Published : 2017.01.01
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Abstract

A fine stage is developed for the 3-DOF error compensation of a linear axis in order to improve the positioning accuracy. This stage is designed as a planar parallel mechanism, and the joints are based on a flexure hinge to achieve ultra-precise positioning. Also, the effect of Abbe's offsets between the measuring and driving coordinate systems is minimized to ensure an exact error compensation. The mode shapes of the designed stage are analyzed to verify the desired 3-DOF motions, and the workspace and displacement of a piezoelectric actuator (PZT) for compensation are analyzed using forward and inverse kinematics. The 3-DOF error of a linear axis is measured and compensated by using the developed fine stage. A marked improvement is observed compared to the results obtained without error compensation. The peak-to-valley (PV) values of the positional and rotational errors are reduced by 92.6% and 91.3%, respectively.

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References

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