반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

CIGS 태양전지의 윈도우 층에 적용 가능한 스퍼터링으로 증착한 AZO 박막의 공정압력의 영향에 따른 특성 연구

A Study on the Effect of Process Pressure on AZO Thin Films Sputtered for the Windows Layers of CIGS Solar Cells

  • 윤여탁 (가천대학교 전자공학과) ;
  • 조의식 (가천대학교 전자공학과) ;
  • 권상직 (가천대학교 전자공학과)
  • Yoon, Yeo-Tak (Department of Electronics Engineering Gachon University) ;
  • Cho, Eou-Sik (Department of Electronics Engineering Gachon University) ;
  • Kwon, Sang-Jik (Department of Electronics Engineering Gachon University)
  • 투고 : 2017.06.20
  • 심사 : 2017.06.23
  • 발행 : 2017.06.30
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초록

For various process pressures, aluminum doped zinc oxide(AZO) films were deposited by in-line pulsed-DC sputtering. The deposited AZO films were optically and electrically investigated and analyzed for the window layers of CIGS solar cell systems. As the pressure was increased from 9 mtorr to 15 mtorr, the thickness of AZO was decreased as a result of scattering and its sheet resistance was rapidly increased. The transmittance of AZO was slightly decreased as the pressure was increased and the calculation of figure of merit(F.O.M) was dependent on the sheet resistance. The structural characteristics of AZO thin films analyzed by X-ray diffraction(XRD) showed no significant dependency according to the pressure.

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참고문헌

  1. Jackson, P., Hariskos, D., Lotter, E., Paetel, S., Wuerz, R., mMenner, R., Wischmann, W., Powalla, M., "New world record efficiency for Cu (In, Ga) Se2 thin-film solar cells beyond 20%," Prog. Photovolt:Res. Apll., 19(7), pp. 894-897, 2011. https://doi.org/10.1002/pip.1078
  2. Santana-Aranda, M. A., Armenta-Estrada, A., Mendoza-Barrera, C. R., Chavez-Chavez, A., Jimenez-Sandoval, S., M. Melendez-Lira, M., "Aluminum doped ZnO by reactive sputtering of coaxial Zn and Al metallic targets," J. Mater. Sci. 18(6), pp. 611-614, 2007. https://doi.org/10.1007/s10854-006-9115-2
  3. Yang, Y., Zeng, X., Zeng, T., Liu, L., Chen, Q., "Deposition of quasi-crystal Al-doped ZnO thin films for photovoltaic device applications," Appl. surf. Sci., 257(1), pp. 232-238, 2010. https://doi.org/10.1016/j.apsusc.2010.06.073
  4. Hegedus, S. S. and Lugue, A., "Status, trends, challenges and the bright future of solar electricity from photovoltaics," Handbook of photovoltaic science and engineering, New York City, Wiley, pp. 1-43, 2003.
  5. Lee, D. N., "A model for development of orientation of vapour deposits," J. Mater. Sci., 24(12), pp. 4375-4378, 1989. https://doi.org/10.1007/BF00544515