반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)
권호 표지

AZO/Ag/AZO 다층박막의 Ag두께에 따른 특성 연구

Influence of Ag thickness on properties of AZO/Ag/AZO Multi-layer Thin Films

  • 연제호 (청주대학교 일반대학원 반도체공학과) ;
  • 김홍배 (청주대학교 이공대학 반도체공학과)
  • Yeon, Je ho (Department of Semiconductor Engineering, Cheongju University) ;
  • Kim, Hong Bae (Department of Semiconductor Engineering, Cheongju University)
  • 투고 : 2017.05.16
  • 심사 : 2017.06.22
  • 발행 : 2017.06.30
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초록

AZO/Ag/AZO multi-layer films deposited on glass substrate by RF magnetron sputtering and thermal evaporator have a much better electrical properties than Al-doped ZnO thin films. The multi-layer structure consisted of three layers, AZO/Ag/AZO, the electrical and optical properties of AZO/Ag/AZO were changed mainly by thickness of Ag layers. The optimum thickness of Ag layers was determined to be $90{\AA}$ for high optical transmittance and good electrical conductivity. The Ag layers thickness $90{\AA}$ is an optical transmittance greater than 80% of visible light and the obtained multilayer thin film with the low resistivity of $8.05{\times}10-3{\Omega}cm$ and the low sheet resistance $5.331{\Omega}/sq$. Applying to TCO and Solar electrode will improve efficiency.

키워드

참고문헌

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