Design Alterations of a Squaring & Grinding Machine for the Solar Cell Wafer to Suppress Vibrations

Shin, Ho Beom;Ro, Seung Hoon;Yoon, Hyun Jin;Kil, Sa Geun;Kim, Young Jo;Kim, Geon Hyeong;Han, Dae Sung;

반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)

제16권3호
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Pages.47-52
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2017
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1738-2270(pISSN)

한국반도체디스플레이기술학회 (The Korean Society Of Semiconductor & Display Technology)

Solar Cell Wafer용 Squaring & Grinding Machine의 진동 억제를 위한 설계 변경

Design Alterations of a Squaring & Grinding Machine for the Solar Cell Wafer to Suppress Vibrations

신호범 (금오공과대학교 대학원) ;
노승훈 (금오공과대학교 기계시스템공학과) ;
윤현진 (금오공과대학교 기계시스템공학과) ;
길사근 (금오공과대학교 대학원) ;
김영조 (구미대학교 기계공학과) ;
김건형 (위드) ;
한대성 (디에이치테크)

Shin, Ho Beom (Graduate School, Kumoh National Institute of Technology) ;
Ro, Seung Hoon (Dept. of Mechanical System Engineering, Kumoh National Institute of Technology) ;
Yoon, Hyun Jin (Dept. of Mechanical System Engineering, Kumoh National Institute of Technology) ;
Kil, Sa Geun (Graduate School, Kumoh National Institute of Technology) ;
Kim, Young Jo (Dept. of Mechanical Engineering, Gumi University) ;
Kim, Geon Hyeong (With Co.) ;
Han, Dae Sung (Dhtech Co., Ltd.)

투고 : 2017.08.18
심사 : 2017.09.18
발행 : 2017.09.30

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초록

Solar cell industry requires high technologies to stabilize apparatuses for the wafer manufacturing. Vibrations of squaring & grinding machines are one of the most critical factors for causing residual stresses of ingots, which are the main reasons of the breakage in the following processes such as wire sawing, cleaning, and modularity. In this study, the structure of a squaring & grinding machine has been analyzed through experiments and computer simulations to figure out the ways to suppress the vibrations effectively, and further to minimize the breakage of wafers. The result shows that simple design changes of applying a few ribs can improve the stability of the machine.

키워드

참고문헌

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