Applied Science and Convergence Technology

The Korean Vacuum Society (한국진공학회)
권호 표지
DOI QR코드

DOI QR Code

Development of a Plasma Training Lab kart: System Setup and Numerical Simulation

  • Joo, Junghoon (Department of Materials Science and Engineering, Kunsan National University)
  • Received : 2017.10.22
  • Accepted : 2017.11.28
  • Published : 2017.11.30
Download PDF
⟨ Previous Next ⟩

Abstract

A mobile lab kart for plasma training is developed with a high vacuum pumping system, vacuum gauges and a glass discharge tube powered by a high voltage transformer connected to a household 60 Hz line. A numerical model is developed by using a commercial multiphysics software package, CFD-ACE+ to analyze the experimental data. Simulations for argon and nitrogen were carried out to provide fundamental discharge characteristics. Variations of the kart configuration were demonstrated: a glass tube with three electric probes, optical emission spectrometer attachment and infra red thermal imaging system to give more detailed analysis of the discharge characteristics.

Keywords

References

  1. Y. Yoo and J. Joo, J. Kor. Inst. Surf. Eng., Vol. 46, No. 4 (2013) 168. https://doi.org/10.5695/JKISE.2013.46.4.168
  2. J. Joo, Kor. Inst. Surf. Eng., Vol. 46, No. 3 (2013) 133. https://doi.org/10.5695/JKISE.2013.46.3.133
  3. J. Joo, Kor. Inst. Surf. Eng., Vol. 45, No. 2 (2012) 53. https://doi.org/10.5695/JKISE.2012.45.2.053
  4. S. Lee, J. Kor. Vac. Soc., Vol. 18, No. 3 (2009) 176. https://doi.org/10.5757/JKVS.2009.18.3.176
  5. D. Kwon and N. Yoon, Appl. Sci. Conv. Technol., Vol. 24, No. 6 (2015) 237. https://doi.org/10.5757/ASCT.2015.24.6.237
  6. H. Kim, W. Yang and J. Joo, J. Appl. Phys. Vol. 118, (2015) 043304-1. https://doi.org/10.1063/1.4927531
  7. J. Joo, Thin Solid Films, Vol. 519 (2011) 6892. https://doi.org/10.1016/j.tsf.2011.04.062
  8. S. Son, K. Yi and J. Joo, J. Mahrholz, and K. Rie, J. Cry. Growth, Vol. 310 (2008) 1697. https://doi.org/10.1016/j.jcrysgro.2007.11.163
  9. J. Joo and S. Rossnagel, J. Kor. Phys. Soc., Vol. 54 (2009) 1048. https://doi.org/10.3938/jkps.54.1048
  10. J. Joo, Appl. Sci. Conv. Technol., Vol. 24, No. 4 (2015) 102. https://doi.org/10.5757/ASCT.2015.24.4.102
  11. J. Joo, Appl. Sci. Conv. Technol., Vol. 23, No. 3 (2014) 139. https://doi.org/10.5757/ASCT.2014.23.3.139
  12. J. Coburn and M. Chen, J. Appl. Phys, Vol. 51 (1980) 3134. https://doi.org/10.1063/1.328060