ETRI Journal

  • 제38권2호
  • /
  • Pages.235-243
  • /
  • 2016
  • /
  • 1225-6463(pISSN)
  • /
  • 2233-7326(eISSN)
한국전자통신연구원 (Electronics and Telecommunications Research Institute)
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Low-Noise MEMS Microphone Readout Integrated Circuit Using Positive Feedback Signal Amplification

  • Kim, Yi-Gyeong (ICT Materials & Components Research Laboratory, ETRI) ;
  • Cho, Min-Hyung (ICT Materials & Components Research Laboratory, ETRI) ;
  • Lee, Jaewoo (ICT Materials & Components Research Laboratory, ETRI) ;
  • Jeon, Young-Deuk (ICT Materials & Components Research Laboratory, ETRI) ;
  • Roh, Tae Moon (ICT Materials & Components Research Laboratory, ETRI) ;
  • Lyuh, Chun-Gi (ICT Materials & Components Research Laboratory, ETRI) ;
  • Yang, Woo Seok (ICT Materials & Components Research Laboratory, ETRI) ;
  • Kwon, Jong-Kee (ICT Materials & Components Research Laboratory, ETRI)
  • 투고 : 2015.07.25
  • 심사 : 2015.09.30
  • 발행 : 2016.04.01
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초록

A low-noise readout integrated circuit (ROIC) for a microelectromechanical systems (MEMS) microphone is presented in this paper. A positive feedback signal amplification technique is applied at the front-end of the ROIC to minimize the effect of the output buffer noise. A feedback scheme in the source follower prevents degradation of the noise performance caused by both the noise of the input reference current and the noise of the power supply. A voltage booster adopts noise filters to cut out the noise of the sensor bias voltage. The prototype ROIC achieves an input referred noise (A-weighted) of -114.2 dBV over an audio bandwidth of 20 Hz to 20 kHz with a $136{\mu}A$ current consumption. The chip is occupied with an active area of $0.35mm^2$ and a chip area of $0.54mm^2$.

키워드

참고문헌

  1. J. Citakovic et al., "A Compact CMOS MEMS Microphone with 66 dB SNR," Int. Solid-State Circuits Conf., San Francisco, CA, USA, Feb. 8-12, 2009, pp. 350-351.
  2. S.A. Jawed, "CMOS Readout Interfaces for MEMS Capacitive Microphones," Ph.D. thesis, School in Information and Communication Technologies, Univ. of Trento, Italy, 2009.
  3. A. Khenkin, MEMS Microphone Technol.: From Theory to Appl., Analog Device, 2013. Accessed Mar. 3, 2013. http://www.analog.com
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  5. A. Uranga et al., "Electrically Enhanced Readout System for a High-Frequency CMOS-MEMS Resonator," ETRI J., vol. 31, no. 4, Aug. 2009, pp. 478-480. https://doi.org/10.4218/etrij.09.0208.0380
  6. J.H. Nielsen and C. Furst, Toward More-Compact Digital Microphones, Analog Dialogue, Analog Device, 2014. Accessed Mar. 3, 2014. http://www.analog.com/library/analogdialogue/cd/vol41n3.pdf
  7. InvenSense, MICROPHONE SPECIFICATIONS EXPLAINED, InvenSense, 2015. Accessed Mar. 3, 2015. http://www.invensense.com/wp-content/uploads/2015/02/MICROPHONE-SPECIFICATIONS-EXPLAINED2.pdf
  8. STMicroelectronics, Tutorial for MEMS microphones, STMicroelectronics, STMicroelectronics, 2015. Accessed Mar. 3, 2015. http://www.st.com/st-web-ui/static/active/cn/resource/ technical/document/application_note/DM00103199.pdf
  9. InvenSense, RF-Hardened, Ultra-low Noise Microphone with Bottom Port and Analog Output, InvenSense, 2014. Accessed July 2, 2014. http://www.invensense.com/wp-content/uploads/2015/02/INMP510.pdf
  10. S. Ersoy et al., "A $0.25 mm^2$ AC-Biased MEMS Microphone Interface with 58 dBA," Int. Solid-State Circuits Conf., San Francisco, CA, USA, Feb. 17-21, 2013, pp. 382-383.

피인용 문헌

  1. Implementation and evaluation of a front-end ASIC for noise dosimeter applications vol.107, pp.2, 2016, https://doi.org/10.1080/00207217.2019.1661020