열처리공학회지 (Journal of the Korean Society for Heat Treatment)

  • 제29권5호
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  • Pages.216-219
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  • 2016
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  • 1225-1070(pISSN)
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  • 2508-4046(eISSN)
한국열처리공학회 (The Korean Society for Heat Treatment)
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Ni 층간박막에 따른 SnO2 박막의 전기적, 광학적 물성 변화

Influence of Ni Interlayer on the Electrical and Optical Properties of SnO2 thin films

  • 송영환 (울산대학교 첨단소재공학부) ;
  • 엄태영 (울산대학교 첨단소재공학부) ;
  • 김대일 (울산대학교 첨단소재공학부)
  • Song, Young-Hwan (School of Materials Science and Engineering, University of Ulsan) ;
  • Eom, Tae-Young (School of Materials Science and Engineering, University of Ulsan) ;
  • Kim, Daeil (School of Materials Science and Engineering, University of Ulsan)
  • 투고 : 2016.07.22
  • 심사 : 2016.08.25
  • 발행 : 2016.09.30
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초록

$SnO_2$ single layer films (100 nm thick) and 2 nm thick Ni intermediated $SnO_2$ films were deposited on glass substrate by RF and DC magnetron sputtering without intentional substrate heating and then the influence of the Ni interlayer on the electrical and optical properties of the films were investigated. As deposited $SnO_2$ single layer films show the optical transmittance of 82.6% in the visible wavelength region and a resistivity of $6.6{ \times}10^{-3}{\Omega}cm$, while $SnO_2/Ni/SnO_2$ trilayer films show a lower resistivity of $2.7{ \times}10^{-3}{\Omega}cm$ and an optical transmittance of 76.3% in this study. Based on the figure of merit, it can be concluded that the intermediate Ni thin film effectively enhances the opto-electrical performance of $SnO_2$ films for use as transparent conducting oxides in flexible display applications.

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참고문헌

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