Transactions of the Korean Society of Mechanical Engineers B (대한기계학회논문집B)

The Korean Society of Mechanical Engineers (대한기계학회)
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Development of Acid Resistance Velocity Sensor for Analyzing Acidic Fluid Flow Characteristics

산성 용액 내 유속 측정을 위한 내산성 센서 개발

  • Choi, Gyujin (Dept. of Advnaced Electronic Circuit Substrate, Chungnam Nat'l Univ.) ;
  • Yoon, Jinwon (Dept. of Mechanical Engineering, Chungnam Nat'l Univ.) ;
  • Yu, Sangseok (Dept. of Mechanical Engineering, Chungnam Nat'l Univ.)
  • Received : 2016.01.12
  • Accepted : 2016.07.29
  • Published : 2016.10.01
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Abstract

This study presents the development of an acid resistance velocity sensor that is used for measuring velocity inside a copper sulfate plating bath. First, researchers investigated the acid resistance coating to confirm the suitability of the anti-acid sensor in a very corrosive environment. Then, researchers applied signal processing methods to reduce noise and amplify the signal. Next, researchers applied a pressure-resistive sensor with an operation amplifier (Op Amp) and low-pass filter with high impedance to match the output voltage of a commercial flowmeter. Lastly, this study compared three low-pass filters (Bessel, Butterworth and Chebyshev) to select the appropriate signal process circuit. The results show 0.0128, 0.0023, and 5.06％ of the mean square error, respectively. The Butterworth filter yielded more precise results when compared to a commercial flowmeter. The acid resistive sensor is capable of measuring velocities ranging from 2 to 6 m/s with a 2.7％ margin of error.

미세 회로 기판 제조에 적용되는 습식공정 중 도금조에서 미세 기판의 정밀한 가공을 위해 산성용액 반응조 내부의 유동특성을 관찰하는 것이 중요하다. 하지만, 상용 유속계 중 내산성을 갖춘 센서가 거의 없어 측정이 매우 어렵다. 본 연구에서는 내산성을 갖는 압저항 센서에 신호처리 기술을 적용하여 유속을 측정할 수 있는 센서를 개발하였다. 상용유속계 수준의 유속데이터 획득을 위해서는 높은 임피던스를 갖는 압저항 센서에 증폭회로 및 저역통과필터를 부착하였으며, 이 때 사용되는 신호처리회로의 출력과 상용유속계의 출력이 일치되도록 하는 신호처리회로의 선정을 위해 Butterworth, Bessel, Chebyshev 필터 회로를 제작하여 유속 측정을 통해 출력을 상용유속계의 출력과 비교한 결과 0.0128 %, 0.0023 %, 5.06 %의 MSE를 확인할 수 있었다. 인가 유속을 변경하면서 내산성 센서의 측정 가능 영역을 확인해 본 결과, 저속 저압 구간에서는 신호와 노이즈 구분이 어려워 신호 처리 알고리즘을 적용해도 원하는 결과를 얻지 못하였고, 2~6 m/s에서 2.7 % 미만의 오차를 갖는 신뢰성 있는 측정이 가능하였다.

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References

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