Journal of the Korean Society for Heat Treatment (열처리공학회지)

The Korean Society for Heat Treatment (한국열처리공학회)
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Effect of Electron Irradiation on the Electrical and Optical Properties of SnO2 Thin Films

전자빔 표면조사에 따른 SnO2 박막의 전기적, 광학적 특성 연구

  • Song, Young-Hwan (School of Materials Science and Engineering, University of Ulsan) ;
  • Moon, Hyun-Joo (School of Materials Science and Engineering, University of Ulsan) ;
  • Kim, Daeil (School of Materials Science and Engineering, University of Ulsan)
  • 송영환 (울산대학교 첨단소재공학부) ;
  • 문현주 (울산대학교 첨단소재공학부) ;
  • 김대일 (울산대학교 첨단소재공학부)
  • Received : 2016.03.10
  • Accepted : 2016.03.24
  • Published : 2016.06.30
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Abstract

We have considered the influence of electron irradiation on the optical and electrical properties of $SnO_2$ thin films deposited with reactive RF magnetron sputtering. After deposition, the films electron irradiated at 300 eV shows a lower sheet resistance of $277{\Omega}/{\square}$ and the optical transmittance in a visible wave length region also influenced with the electron irradiation energy. The film that electron irradiated at 400 eV shows a higher optical transmittance of 82.6% in this study. By comparison of figure of merit, it is concluded that the post-deposition electron irradiation at 300 eV is the optimum condition for the enhancement of opto-electrcal performance of $SnO_2$ thin film in this study.

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References

  1. L. Liu, S. Ma, H. Wu, B. Zhu, H. Yang, J. Tang and X. Zhao : Mater. Lett., 149 (2015) 43. https://doi.org/10.1016/j.matlet.2015.02.093
  2. C. Ke, W. Zhu, J. S. Pan and Z. Yang : Curr. Appl. Phys., 11 (2011) 306. https://doi.org/10.1016/j.cap.2010.11.067
  3. A. H. Ali, A. Shuhaimi and Z. Hassan : Appl. Surf. Sci., 288 (2014) 599. https://doi.org/10.1016/j.apsusc.2013.10.079
  4. Y. J. Jo, C. H. Hong and J. S. Kwak : Curr. Appl. Phys., 11 (2011) 143.
  5. Y. Kim, S. Heo, H. Lee, Y. Lee and D. Kim : Appl. Surf. Sci., 258 (2012) 3903. https://doi.org/10.1016/j.apsusc.2011.12.057
  6. G. Haacke : J. Appl. Phys., 47 (1976) 4086. https://doi.org/10.1063/1.323240
  7. H. J. Moon and D. Kim : J. Korean. Soc. Heat Treat., 29 (2016) 62. https://doi.org/10.12656/jksht.2016.29.2.62
  8. H. Koseoglu, F. Turkoglu, M. Kurt, M. D. Yaman, F. G. Akca, G. Aygun, and L. Ozyuzer : Vacuum 120 (2015) 8. https://doi.org/10.1016/j.vacuum.2015.06.027
  9. Y. Uno, A. Okada, K. Uemura, P. Raharjo, T. Furukawa, K. Karato, Precision Eng., 29 (2005) 449. https://doi.org/10.1016/j.precisioneng.2004.12.005

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