전력전자학회논문지 (The Transactions of the Korean Institute of Power Electronics)

  • 제21권2호
  • /
  • Pages.150-159
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  • 2016
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  • 1229-2214(pISSN)
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  • 2288-6281(eISSN)
전력전자학회 (The Korean Institute of Power Electronics)
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5kW급 플라즈마 방전장치 설계 최적화의 관한 연구

A Study on the Optimal Design of 5 kW Plasma Discharger

  • Noh, Hyun-Kyu (Dept. of Electrical Engineering, Myongji University) ;
  • Shin, Chul-Jun (Dept. of Electrical Engineering, Myongji University) ;
  • Lee, Jun-Young (Dept. of Electrical Engineering, Myongji University)
  • 투고 : 2015.11.07
  • 심사 : 2016.02.25
  • 발행 : 2016.04.20
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초록

This paper presents a study on the design optimization of a 5 kW plasma discharger for driving plasma reactor. The proposed study is composed of a high-frequency inverter based on the full-bridge circuit using soft switching techniques for high-frequency switching. The switching frequency in the operating region is the area of 130-200 kHz. By applying the LC resonance technique and a variable switching frequency, control technique is designed to be stable under changes in the load characteristics of the plasma reactor. This paper presents a quantitative analysis technique for design optimization. Experiments are performed according to load characteristic variations depending on the vacuum of the plasma reactor. This paper has verified the topology and design method for the 5 kW plasma discharger design.

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참고문헌

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피인용 문헌

  1. A Study on Reactor Capacitance Estimation Algorithm and 5kW Plasma Power Supply Design for Linear Output Control of Wide Range vol.21, pp.6, 2016, https://doi.org/10.6113/TKPE.2016.21.6.514