참고문헌
- M. Delfino, B. C. Chung, W. Tsai, S. Salimian, D. P. Favreau, and S. M. Merchant, "X‐ray photoemission analysis and electrical contact properties of NF3 plasma cleaned Si surfaces", Journal of Applied Physics, 72, 3718 (1992). https://doi.org/10.1063/1.352320
- S.-E. Nam, A. Park, and Y.-I. Park, "Separation and recovery of f-gases", Membr. J., 23, 189 (2013).
- http://www.industrytoday.co.uk/market-research-industry-today/nitrogen-trifluoride-nf3-market-will-re flect-significant-growth-prospects-during-2014---2020/45304.
- http://www.whatech.com/market-research/materials-chemicals/115729-learn-details-of-the-nitrogen-trifluorideand-fluorine-gas-market-size-share-and-forecasts-to-2020.
-
K. Kunihiko, F. Tatsuo, F. Shizuichi, and S. Manabu, "Study of ,
$CF_4 ,$C_2F_6$ ,$SF_6$ and$NF_3$ decomposition characteristics and etching performance in plasma state", Japanese Journal of Applied Physics, 36, 5724 (1997). https://doi.org/10.1143/JJAP.36.5724 - M. Carta, R. Malpass-Evans, M. Croad, Y. Rogan, J. C. Jansen, P. Bernardo, F. Bazzarelli, and N. B. McKeown, "An efficient polymer molecular sieve for membrane gas separations", Science, 339, 303 (2013). https://doi.org/10.1126/science.1228032
-
P. Chiesa, S. Campanari, and G. Manzolini, "
$CO_2$ cryogenic separation from combined cycles integrated with molten carbonate fuel cells", International Journal of Hydrogen Energy, 36, 10355 (2011). https://doi.org/10.1016/j.ijhydene.2010.09.068 - R. B. Eldridge, "Olefin/paraffin separation technology:a review", Industrial & Engineering Chemistry Research, 32, 2208 (1993). https://doi.org/10.1021/ie00022a002
- P. Kowalczyk, P. A. Gauden, and A. P. Terzyk, "Cryogenic separation of hydrogen isotopes in single-walled carbon and boron-nitride nanotubes: Insight into the mechanism of equilibrium quantum sieving in quasi-one-dimensional pores", The Journal of Physical Chemistry B, 112, 8275 (2008). https://doi.org/10.1021/jp800735k
- Q. Min Wang, D. Shen, M. Bülow, M. Ling Lau, S. Deng, F. R. Fitch, N. O. Lemcoff, and J. Semanscin, "Metallo-organic molecular sieve for gas separation and purification", Microporous and Mesoporous Materials, 55, 217 (2002). https://doi.org/10.1016/S1387-1811(02)00405-5
- S. Sircar, T. C. Golden, and M. B. Rao, "Activated carbon for gas separation and storage", Carbon, 34, 1 (1996). https://doi.org/10.1016/0008-6223(95)00128-X
- J. H. Park, D. J. Kim, and S. Y. Nam, "Characterization and preparation of PEG-polyimide copolymer asymmetric flat sheet membranes for carbon dioxide separation", Membr. J., 25, 547 (2015). https://doi.org/10.14579/MEMBRANE_JOURNAL.2015.25.6.547
- P. van de Witte, P. J. Dijkstra, J. W. A. van den Berg, and J. Feijen, "Phase separation processes in polymer solutions in relation to membrane formation", J. Membr. Sci., 117, 1 (1996). https://doi.org/10.1016/0376-7388(96)00088-9
- G. R. Guillen, Y. Pan, M. Li, and E. M. V. Hoek, "Preparation and characterization of membranes formed by nonsolvent induced phase separation: A review", Industrial & Engineering Chemistry Research, 50, 3798 (2011). https://doi.org/10.1021/ie101928r
- M. Shang, H. Matsuyama, M. Teramoto, D. R. Lloyd, and N. Kubota, "Preparation and membrane performance of poly(ethylene-co-vinyl alcohol) hollow fiber membrane via thermally induced phase separation", Polymer, 44, 7441 (2003). https://doi.org/10.1016/j.polymer.2003.08.033
- H. C. Park, Y. P. Kim, H. Y. Kim, and Y. S. Kang, "Membrane formation by water vapor induced phase inversion", J. Membr. Sci., 156, 169 (1999). https://doi.org/10.1016/S0376-7388(98)00359-7
- H. A. Tsai, C. Y. Kuo, J. H. Lin, D. M. Wang, A. Deratani, C. Pochat-Bohatier, K. R. Lee, and J. Y. Lai, "Morphology control of polysulfone hollow fiber membranes via water vapor induced phase separation", J. Membr. Sci., 278, 390 (2006). https://doi.org/10.1016/j.memsci.2005.11.029
-
S.-H. Cho, H.-K. Lee, and T.-B. Kang, "Separation of
$H_2/N_2$ gas mixture by PTMSP-PEI and PDMS-PEI composite membranes", Membr. J., 13, 291 (2003). -
H. Kim, M. Lee, W. Park, S. Lee, H. Lee, and S. Lee, "Permeation properties of single gases (
$N_2,\, O_2, \,SF_6, \,CF_4$ ) through PDMS and PEBAX membranes", Membr. J., 22, 201 (2012). - A. F. Ismail, I. R. Dunkin, S. L. Gallivan, and S. J. Shilton, "Production of super selective polysulfone hollow fiber membranes for gas separation", Polymer, 40, 6499 (1999). https://doi.org/10.1016/S0032-3861(98)00862-3
- D. Wang, K. Li, and W. K. Teo, "Polyethersulfone hollow fiber gas separation membranes prepared from NMP/alcohol solvent systems", J. Membr. Sci., 115, 85 (1996). https://doi.org/10.1016/0376-7388(95)00312-6
- L. S. White, T. A. Blinka, H. A. Kloczewski, and I. F. Wang, "Properties of a polyimide gas separation membrane in natural gas streams", J. Membr. Sci., 103, 73 (1995). https://doi.org/10.1016/0376-7388(94)00313-N
- A. F. Ismail and S. J. Shilton, "Polysulfone gas separation hollow fiber membranes with enhanced selectivity", J. Membr. Sci., 139, 285 (1998). https://doi.org/10.1016/S0376-7388(97)00331-1
-
H. Y. Hwang, S. Y. Nam, H. C. Koh, S. Y. Ha, G. Barbieri, and E. Drioli, "The effect of operating conditions on the performance of hollow fiber membrane modules for
$CO_2/N_2$ separation", Journal of Industrial and Engineering Chemistry, 18, 205 (2012). https://doi.org/10.1016/j.jiec.2011.11.021 - S. Lee, J. S. Lee, M. Lee, J.-W. Choi, S. Kim, and S. Lee, "Separation of sulfur hexafluoride (SF6) from ternary gas mixtures using commercial polysulfone (PSf) hollow fiber membranes", J. Membr. Sci., 452, 311 (2014). https://doi.org/10.1016/j.memsci.2013.10.044
- C. Cao, T.-S. Chung, S. B. Chen, and Z. Dong, "The study of elongation and shear rates in spinning process and its effect on gas separation performance of Poly(ether sulfone) (PES) hollow fiber membranes", Chemical Engineering Science, 59, 1053 (2004). https://doi.org/10.1016/j.ces.2003.10.023
- T.-S. Chung, W.-H. Lin, and R. H. Vora, "The effect of shear rates on gas separation performance of 6FDA-durene polyimide hollow fibers", J. Membr. Sci., 167, 55 (2000). https://doi.org/10.1016/S0376-7388(99)00278-1
- O. M. Ekiner and G. Vassilatos, "Polyaramide hollow fibers for H2/CH4 separation: II. Spinning and properties", J. Membr. Sci., 186, 71 (2001). https://doi.org/10.1016/S0376-7388(00)00665-7
- S. J. Shilton, A. F. Ismail, P. J. Gough, I. R. Dunkin, and S. L. Gallivan, "Molecular orientation and the performance of synthetic polymeric membranes for gas separation", Polymer, 38, 2215 (1997). https://doi.org/10.1016/S0032-3861(96)00753-7
- T. C. Merkel, V. I. Bondar, K. Nagai, B. D. Freeman, and I. Pinnau, "Gas sorption, diffusion, and permeation in poly(dimethylsiloxane)", Journal of Polymer Science Part B: Polymer Physics, 38, 415 (2000). https://doi.org/10.1002/(SICI)1099-0488(20000201)38:3<415::AID-POLB8>3.0.CO;2-Z
- D. Hofmann, L. Fritz, J. Ulbrich, C. Schepers, and M. Bohning, "Detailed-atomistic molecular modeling of small molecule diffusion and solution processes in polymeric membrane materials", Macromolecular Theory and Simulations, 9, 293 (2000). https://doi.org/10.1002/1521-3919(20000701)9:6<293::AID-MATS293>3.0.CO;2-1
- J. G. Wijmans and R. W. Baker, "The solution-diffusion model: A review", J. Membr. Sci., 107, 1 (1995). https://doi.org/10.1016/0376-7388(95)00102-I
-
D. J. Branken, H. M. Krieg, J. P. le Roux, and G. Lachmann, "Separation of
$NF_3$ and$CF_4$ using amorphous glassy perfluoropolymer Teflon AF and Hyflon AD60 membranes", J. Membr. Sci., 462, 75 (2014). https://doi.org/10.1016/j.memsci.2014.03.033 -
S. Park, W. R. Kang, H. T. Kwon, S. Kim, M. Seo, J. Bang, S. H. Lee, H. K. Jeong, and J. S. Lee, "The polymeric upper bound for
$N_2/NF_3$ separation and beyond; ZIF-8 containing mixed matrix membranes", J. Membr. Sci., 486, 29 (2015). https://doi.org/10.1016/j.memsci.2015.03.030