대한기계학회논문집B (Transactions of the Korean Society of Mechanical Engineers B)

  • 제40권2호
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  • Pages.111-117
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  • 2016
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  • 1226-4881(pISSN)
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  • 2288-5324(eISSN)
대한기계학회 (The Korean Society of Mechanical Engineers)
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실리콘 박막 트랜지스터 내 포논 평균자유행로 스펙트럼 비등방성 열전도 특성에 대한 수치적 연구

A Numerical Study on the Anisotropic Thermal Conduction by Phonon Mean Free Path Spectrum of Silicon in Silicon-on-Insulator Transistor

  • 강형선 (조선이공대학교 기계설계과) ;
  • 고영하 (조선이공대학교 기계설계과) ;
  • 진재식 (조선이공대학교 기계설계과)
  • Kang, Hyung-sun (Dept. of Mechanical Design, Chosun College of Science & Technology) ;
  • Koh, Young Ha (Dept. of Mechanical Design, Chosun College of Science & Technology) ;
  • Jin, Jae Sik (Dept. of Mechanical Design, Chosun College of Science & Technology)
  • 투고 : 2015.10.26
  • 심사 : 2015.12.20
  • 발행 : 2016.02.01
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초록

본 연구의 목적은 실리콘 열전달 조절을 위한 포논의 평균자유행로(Mean free path, MFP) 스펙트럼 열전달 기여도 예측이다. 열전달의 크기 효과는 포논의 MFP 와 재료의 특성길이가 비슷할 때 나타나는데, 나노시스템 응용을 위한 재료의 열전달 증감을 위해 포논 MFP 스펙트럼에 대한 열전달 기여도 예측이 중요하다. 이를 위해 포논의 주파수 의존성이 고려된 볼츠만 수송방정식(Boltzmann transport equation) 근간의 full phonon dispersion 모델을 통해 실리콘 박막(Silicon-on-Insulator) 트랜지스터의 실리콘 박막 두께 변화(41-177 nm)에 따른 포논 MFP 스펙트럼 열전달 특성 및 비등방성을 해석함으로써, 본 연구 결과는 향후 박막 트랜지스터에 대한 고효율 열소산(heat dissipation) 설계전략에 활용될 수 있다.

The primary concern of this research is to examine the phonon mean free path (MFP) spectrum contribution to heat conduction. The size effect of materials is determined by phonon MFP, and the size effect appears when the phonon MFP is similar to or less than the characteristic length of materials. Therefore, knowledge of the phonon MFP is essential to increase or decrease the heat conduction of a material for engineering applications, such as micro/nanosystems. In this study, frequency dependence of the phonon transport is considered using the Boltzmann transport equation based on a full phonon dispersion model. Additionally, the phonon MFP spectrums of in-plane and out-of-plane heat transport are investigated by varying the film thickness of the silicon layer from 41 nm to 177 nm. This will increase the understanding of anisotropic heat conduction in a SOI (Silicon-on-Insulator) transistor.

키워드

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피인용 문헌

  1. Direct Determination of Spectral Phonon-Surface Scattering Rate from Experimental Data on Spectral Phonon Mean Free Path Distribution vol.40, pp.9, 2016, https://doi.org/10.3795/KSME-B.2016.40.9.621